Dual spindle piezoelectric detection gyroscope possessing magnetostriction vibrator

Abstract

A dual axis piezoelectric detection gyroscope with a magnetostrictive vibrator in the micro electromechanical technical field comprises a magnetostrictive vibrator, a driving coil, an output electrode and a cantilever beam. The magnetostrictive vibrator has a structure that the two square surfaces of a cuboid are provided with square-hole holes, and the inner boundary and the outer boundary of the square-hole shape are squares. The vibration of the magnetostrictive vibrator under special model is regarded as reference vibration; the magnetostrictive vibrator in the model has special positionsin both directions in which the moving directions on an upper surface and a lower surface are opposite. When the outside world has angular velocity, Coriolis force with opposite direction is generated on the opposite position of the moving direction to enable piezoelectric film to deform and generate internal stress, and the angular velocity of the outside dual axis is detected by the electric potential generated on the output electrode. The dual axis piezoelectric detection gyroscope has the advantages of simple structure, strong shock resistance, convenient fixing, sensitive dual axis detection, weak coupling interference between the reference vibration and the detection signal and power consumption saving owing to being free of high-speed rotation.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular to a biaxial piezoelectric detection gyroscope with a magnetostrictive vibrator. Background technique [0002] Gyroscope is the core device of attitude control and inertial guidance. The development of inertial technology and the improvement of guidance requirements for satellites and missiles require gyroscopes to develop in the direction of low power, long life, small size, and adaptability to various harsh environments. [0003] After searching the literature of the prior art, it was found that the Chinese patent "Piezoelectric Gyro Element and Piezoelectric Gyroscope" (patent application number: 200510131905.3) mentions that the structure of the prismatic vibrating body of the piezoelectric material can be used to detect the 2-axis Angular velocity in the direction. One end of a prism-shaped piezoelectric vibrator with a rectangular cross-s...

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Problems solved by technology

[0004] This technology has the following disadvantages: First, the drive circuit requires multiple phase shifts, and some drive circuits also include amplitude detection circuits and AGC circuits, which have high requirements for control, and the circuits are complex, with large interference and noise, and it is difficult to obtain ideal drive signals.

Secondly, by applying four-phase driving signals with different phases to four different electrodes to make the piezoelectric body itself generate circular motion as a reference motion, regular circular motion is difficult to achieve accurately, which increases the error of angular velocity detection

To ensure that the piezoelectric body rotates to obtain high-speed circular motion, the power consumption is large

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