The invention provides a
surface acoustic wave temperature sensor, a manufacturing method and a
demodulation system, and belongs to the technical field of sensors. The sensor comprises a
piezoelectric substrate, four groups of interdigital transducers formed on the
piezoelectric substrate, four groups of reflecting gratings and a group of
planar antennas, wherein the surface of the
piezoelectric substrate between the two groups of interdigital transducers is covered with a
temperature sensitive film, and the two groups of reflecting gratings, the two groups of interdigital transducers, the
temperature sensitive film and the piezoelectric substrate form a detection
resonance area; the other two groups of interdigital transducers, the other two groups of reflecting gratings and the piezoelectric substrate form a reference
resonance region; an isolation groove is formed in the piezoelectric substrate between the detection
resonance area and the reference resonance area; and one end of the planar antenna is connected with the group of interdigital transducers in the detection resonance area, and the other end of the planar antenna is connected with the group of interdigital transducers in the reference resonance area. According to the invention, differential compensation of common-mode interference is realized, propagation of surface acoustic
waves of the detection resonance area to the reference resonance area is blocked through the isolation groove, and
coupling interference between the two resonators is reduced.