Elastic measuring head in three-dimensional micro-nano contact scanning probe

A scanning probe, micro-nano technology, applied in the field of micro-nano measurement, can solve problems such as troublesome decoupling, uneven stress distribution, complex decoupling, etc., achieve good structural stability, reduce inter-axis coupling interference, and facilitate decoupling. Effect

A scanning probe, micro-nano technology, applied in the field of micro-nano measurement, can solve problems such as troublesome decoupling, uneven stress distribution, complex decoupling, etc., achieve good structural stability, reduce inter-axis coupling interference, and facilitate decoupling. Effect

CN102494607AActive Publication Date: 2012-06-13HEFEI UNIV OF TECH
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  • Elastic measuring head in three-dimensional micro-nano contact scanning probe
  • Elastic measuring head in three-dimensional micro-nano contact scanning probe
  • Elastic measuring head in three-dimensional micro-nano contact scanning probe

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Experimental program
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Effect test

Embodiment Construction

[0036] In this embodiment, the structure of the three-dimensional micro-nano contact scanning probe is set as follows:

[0037] see figure 1 , figure 2 and image 3 , the measuring unit is set as follows: the front cylinder 1a and the rear cylinder 1b are connected to form a cylinder; in the front cylinder 1a, the anti-reflection miniature Michelson interferometer 2 is fixedly arranged in the installation box 3a; In the cylinder 1b, the two-dimensional angle sensor 4 based on the DVD optical pick-up head is fixedly installed on the mounting plate 5a; a cylinder cover 7 with external threads is arranged at the afterbody of the rear section cylinder 1b, with the cylinder cover 7 on the cylinder cover 7 The external thread is fixedly connected to the frame of the nanometer three-dimensional coordinate measuring machine;

[0038] see Figure 6b and Figure 6a, the detection head 6 is set as follows: a fixed ring 8 is set on the front end face of the front section cylinder 1a...

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Abstract

The invention discloses an elastic measuring head in a three-dimensional micro-nano contact scanning probe. The elastic measuring head is characterized in that: a cross suspension piece is arranged in the center of a fixed circular ring; a cantilever spring plate is connected to the arm end of each cantilever in the cross suspension piece, and the other end of each cantilever spring plate is connected with the fixed circular ring to form a suspension structure of the cross suspension piece in the fixed circular ring; on a side plane, towards the inside of a cylinder body, of the cross suspension piece, a center plane reflective mirror is arranged in the center of the cross suspension piece, and a cantilever plane reflective mirror is arranged on the arm end part of at least one cantilever which is positioned at the cross suspension piece; and on a side plate, towards the outside of the cylinder body, of the cross suspension piece, a scanning probe is fixedly arranged in the center of the cross suspension piece, and a measuring ball positioned at the foremost end of the scanning probe is fixedly arranged on the end part of the scanning probe. The elastic measuring head disclosed by the invention can obtain detection effects with wide measuring range, high accuracy, high sensitivity and small measured force.

Description

technical field [0001] The invention relates to the field of micro-nano measurement, and more specifically relates to an elastic measuring head used in a high-precision and large-range three-dimensional micro-nano contact scanning probe used in a nano-coordinate measuring machine. Background technique [0002] With the development of micro-nano processing technology, micro-devices with sizes between millimeters and microns have come out one after another, such as micro-lenses, micro-gears, micro-chips, fuel injectors, etc.; the shape of micro-devices is becoming more and more complex, and the allowable dimensional tolerance Therefore, there is an urgent need for a three-coordinate measuring machine with nanometer-level measurement accuracy in practice. [0003] The nano three-dimensional coordinate measuring machine is mainly composed of two parts: a three-dimensional motion platform with nano-positioning measurement function and a probe with sensing function. There are two...

Claims

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Application Information

Patent Timeline
13 Jun 2012
Publication
CN102494607A
IPC
G01B11/00; G01B11/02
Inventors
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