Quartz pitchfork gyroscope with built-in integrated charge amplifier

Abstract

The invention discloses a quartz pitchfork gyroscope with a built-in integrated charge amplifier. The quartz pitchfork gyroscope comprises a quartz pitchfork sensitive element, a ceramic mixed integrated circuit and an encapsulating tube shell, wherein the quartz pitchfork sensitive element comprises a driving fork arm, a pickup fork arm, a torsion frame and an anchor point; the tube shell comprises a base, an upper cover plate and multiple pins; the ceramic mixed integrated circuit comprises a precision operational amplifier, a feedback resistor, a feedback capacitor and a ceramic substrate; the ceramic mixed integrated circuit extracts and amplifies induction charge from the quartz pitchfork gyroscope pickup fork arm into a voltage signal and outputs onto the pin of the tube shell. Direct output of weak charge signals is avoided, the influence of pollutants including residual soldering flux, lead distributed capacitance, dust, insulating varnish and water vapour and outside circuit noise on the charge extraction and amplification in the welding process can be effectively solved, the stability and signal-to-noise ratio for detecting quartz pitchfork gyroscope weak charge signals are enhanced, and the environmental adaptation and detection precision of the quartz pitchfork gyroscope are improved.

Description

technical field [0001] The invention relates to a quartz tuning fork gyroscope with a built-in integrated charge amplifier, belonging to the field of micro-electromechanical manufacturing (MEMS) inertial sensors. Background technique [0002] Quartz micromechanical gyroscope is a new type of angular rate sensor based on MEMS technology. It is manufactured by MEMS processes such as coating, photolithography, and corrosion. It has the advantages of being suitable for mass production and low cost. It can be widely used in short-term navigation, platform stabilization systems, telemetry Remote control and other military and civilian fields. [0003] The quartz micromechanical gyro sensitive element is composed of driving fork arm, pick-up fork arm, torsion frame and base. The device is based on the principle of vibrating gyroscope, Coriolis force induction and quartz piezoelectric characteristics. When an external angular motion acts on the sensor, a piezoelectric charge propor...

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Problems solved by technology

[0004] Existing quartz tuning fork gyroscopes are all in the form of independent packaging of sensitive components and pre-processing circuits. The electrical connection between the pre-stage charge amplifier and the sensitive components is directly exposed to the external environment. Since the detected piezoelectric charge signal is very weak, it is extremely difficult to It is susceptible to the influence of pollutants such as lead distributed capacitance, dust, insulating varnish, water vapor, and external circuit noise. These interferences can reduce the stability of the gyro. In order to solve this problem, the three defense measures for the signal processing circuit and the wire bonding process are all Very stringent requirements are put forward, which undoubtedly increases the difficulty of the assembly process of the quartz tuning fork gyroscope

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