And/not gate type non-volatility memory and manufacturing method and operation method therefor
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- POWERCHIP SEMICON CORP
- Publication Date
- 2008-02-06
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a semiconductor element, in particular to a NAND gate (NAND) type non-volatile memory and its manufacturing method and operation method. Background technique
[0002] Non-volatile memory elements have been widely used in personal computers and electronic devices due to their advantages of multiple data storage, reading, and erasing, and the stored data will not disappear after power off. a memory element.
[0003] A typical non-volatile memory device is generally designed to have a stacked gate (Stacked-Gate) structure, which includes a floating gate (Floating Gate) and a control gate (Control Gate) made of doped polysilicon. The floating gate is located between the control gate and the substrate, and is in a floating state, not connected to any circuit, while the control gate is connected to the word line (Word Line), and also includes the tunnel oxide layer (Tunneling Oxide) and an inter-gate dielectric layer (Inter-Gate Di...