Workholder for multi-line cutting machine

Abstract

A workholding fixture used by a multi-wire cutting machine consists of a primary connection socket and a secondary connection socket, a primary connection sheet and a secondary connection sheet. The primary connection socket and the primary connection sheet are fixed by bolts in a plane connection and the secondary connection socket and the secondary connection sheet are fixed by positioning bolts in a plane connection. The present invention is characterized in that the shape of a positioning bolt hole of the secondary connection socket for holding the positioning bolt is different such as the long groove shape and the oval shape. Compared with the prior art, the present invention changes the shape of the bolt hole of the secondary connection socket for holding the positioning bolt; therefore, when the position of the secondary workpiece is inconsistent with the position of the primary workpiece after the primary workpiece is fixed and positioned, only the positioning bolt is unscrewed and the oval hole is used for adjusting the front and rear positions of the secondary connection sheet slightly, thereby carrying out fixing. The workholding fixture overcomes the defects that the shape of the bolt hole of the secondary connection socket for holding the positioning bolt in the prior art is round and the workpiece can not be adjusted forwards or backwards.

Description

【Technical field】 [0001] The invention belongs to the field of multi-wire cutting silicon single crystal ingots, and in particular belongs to a workpiece that is matched with a multi-wire cutting machine to fix a silicon single crystal ingot and then cut the silicon single crystal ingot into silicon single wafers by using a multi-wire cutting machine fixture. 【Background technique】 [0002] Multi-wire cutting technology is a relatively advanced silicon wafer processing technology in the world at present. Its principle is to use a high-speed moving steel wire to drive the cutting blade attached to the steel wire to rub against hard and brittle materials such as semiconductors, so as to achieve cutting effect. During the whole process, the steel wire is guided by more than a dozen wire pulleys to form a wire net on the main wire roller, and the workpiece to be processed is fed by the rise and fall of the workpiece table, which can cut hard and brittle materials such as semico...

AI Technical Summary

Problems solved by technology

[0004] When the existing workpiece fixture fixes the workpiece, there are the following problems: after the leading workpiece is fixed, the subordinate workpiece must strictly refer to the position of the leading workpiece as a benchmark to fix the subordinate workpiece according to the requirements, but this kind of workpiece fixture must be adjusted. The location of the wire cutting machine is very troublesome, so that it is time-consuming and laborious, and it is difficult to ensure the consistency of the leading workpiece and the leading workpiece, resulting in inconsistent thickness of the silicon wafer cut by the multi-wire cutting machine, low pass rate, and sometimes jumping wires in the wire network , disconnection phenomenon, affecting the normal operation of the multi-wire cutting machine

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