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Electric incandescent lamp and light irradiation type heat treatment device

A technology of incandescent lamps and filaments, which is applied in the manufacture of luminous bodies, electrical components, semiconductors/solid-state devices, etc., and can solve problems such as being unable to be heated by the processed body

Inactive Publication Date: 2009-04-15
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, a temperature difference occurs between the central part and the outer peripheral edge of the object to be processed, so the object to be processed cannot be heated uniformly.

Method used

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  • Electric incandescent lamp and light irradiation type heat treatment device
  • Electric incandescent lamp and light irradiation type heat treatment device
  • Electric incandescent lamp and light irradiation type heat treatment device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0086] Use Figure 1 to Figure 10 , to illustrate an embodiment of the present invention.

[0087] Fig. 1 is a cross-sectional view of a light irradiation type heat treatment device composed of a plurality of independently powered incandescent lamps of this embodiment arranged in parallel, figure 2 It is a view of an object to be treated viewed from above the paper surface of the light irradiation type heat treatment apparatus shown in FIG. 1 through a plurality of incandescent lamps arranged in parallel.

[0088]As shown in FIG. 1 , this light irradiation type heat treatment apparatus 2 has a chamber 4 divided into a lamp unit accommodating space S1 and a heat treatment space S2 by a quartz window 3 made of, for example, quartz glass that transmits light. By irradiating the light emitted from the first lamp unit 5 and the second lamp unit 6 arranged in the lamp unit housing space S1 to the object 7 arranged in the heat treatment space S2 through the quartz window 3, the obje...

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PUM

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Abstract

Filament lamps whose individual filament coils can be set to specific temperatures in filament lamps that are supplied with electric power independently and to provide a heat treatment device of the light irradiation type that uses said lamps. Inside of a light emitting tube of each lamp, which has the hermetically sealed portions at each end, are multiple filament modules which have been made by linking pairs of leads which supply electrical power to both ends of coiled filaments and individual filaments that are placed so that they extend along the axis of the light emitting tube. In the electrically connected filament lamps, whose individual leads are connected to the respective electrically conductive material placed in the hermetically sealed portions, at least one of the individual filaments is made up of a single wire and at least two are made up of bundled wires with the single wire being located between the bundled wires.

Description

technical field [0001] The present invention relates to an independently powered incandescent lamp and a light irradiation heat treatment device in which a plurality of the incandescent lamps are arranged in parallel. Background technique [0002] In general, in semiconductor manufacturing processes, various processes such as silicon oxide film formation and impurity diffusion require rapid heat treatment and uniform heating of the object to be processed. [0003] Patent Document 1 describes the following light irradiation type heat treatment apparatus, which is configured to heat the object to be processed by irradiating light from each filament to the object to be processed, and to arrange the inside of each arc tube with different total lengths. A plurality of incandescent lamps with coiled filaments are arranged so that the filaments correspond to the shape of the object to be processed to form a planar light source. [0004] 11 is a perspective view showing the structu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01K1/14H01L21/26
CPCH01K9/00H01L21/67115H01K1/14H01K1/16
Inventor 谷野贤二水川洋一铃木信二
Owner USHIO DENKI KK