Cooling trap unit

A technology of cooling traps and cooling plates, which is applied in the direction of condensation traps/cold partitions, refrigeration and liquefaction, lighting and heating equipment, and can solve problems such as the difficulty in determining the end of drainage and regeneration

Active Publication Date: 2009-05-06
CANON ANELVA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Meanwhile, it is difficult to determine the timing of the end of drainage and the end of regeneration

Method used

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Examples

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Effect test

no. 1 example

[0024] FIG. 1 is a schematic diagram of an example of a cooling trap unit including a refrigeration structure according to this embodiment, in which a vacuum container is attached to a refrigerator.

[0025] Referring to FIG. 1 , a cooling trap unit 3 in which a vacuum container 2 is attached to a refrigerator 1 such as a vacuum flanged Stirling cycle refrigerator will be explained. The refrigerator 1 used in the present invention may be any one of different types of refrigerators, such as Stirling, GM, pulse tube, Solvay cycle or compressor refrigerators.

[0026] The refrigerator 1 has a heat absorption unit 5 and a vacuum flange 6 attached to the distal end of the cylindrical housing 4 . A cylindrical thin plate called a cooling plate 7 is made of a material having high thermal conductivity such as copper, and the cooling plate 7 is attached to the heat sink unit 5 of the refrigerator 1 in close contact with the heat sink unit 5 on the vacuum side. When the refrigerator 1...

no. 2 example

[0040] 3 is a schematic view showing an example of a cooling trap unit including a regenerative structure according to a second embodiment in which a water tank is arranged at the bottom of a vacuum container. Portions common to those in the first embodiment are denoted by the same reference numerals.

[0041] In the arrangement shown in FIG. 3 , the water tank 25 is arranged in the vacuum vessel 24 below the cooling plate 26 and has a bottom area smaller than that of the vacuum vessel 24 . In this arrangement, the water melted during the regeneration process is stored in the water tank 25 and is positioned directly below the cooling plate 26 .

[0042] Water stored in the water tank 25 may be discharged through the drain port 10 . According to this embodiment, the drain port 10 is used as a first drain port to discharge the water stored in the water tank 25 . Therefore, the cooling plate 26 can be in contact with the water stored in the water tank 25 even at the stage where...

no. 3 example

[0045] Figure 4A and 4B is a view showing an example in which groove-like steps 32 are formed in the surface of the cooling plate according to the third embodiment, in which Figure 4A is the plan view of the surface of the cooling plate, and Figure 4B It is a side view of the cooling plate 31 seen from the direction AA'. It should be noted that the cooling plates 7 and 26 of the first and second embodiments are cylindrical, whereas the cooling plate 31 of the third embodiment is a flat cooling plate which is machined into a cylindrical shape. got before.

[0046] Such as Figure 4A and 4B As shown in , the surface of the cooling plate 31 is provided with a plurality of longitudinal groove-like steps 32 , and the steps 32 extend vertically downward from the top along the direction of gravity. Slotted steps are not limited to such as Figure 4A The longitudinal steps are shown extending vertically downwards, but may instead slope from top to bottom (not shown). By forming...

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PUM

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Abstract

A cooling trap unit including a vacuum vessel with a drain port, a refrigerator connected to the vacuum vessel such that an endothermic unit is located on a vacuum side, and a cooling panel which is fixed to the endothermic unit to be in tight contact with it and condenses or solidifies gas, includes a water reservoir unit capable of storing liquefied liquid in the vacuum vessel, when liquefying the gas condensed or solidified by the cooling panel and discharging the liquid outside the vacuum vessel, such that the liquefied liquid is in contact with the cooling panel, and a detection unit for discharging the liquid stored in the water reserving unit through the drain port based on a detection signal which is obtained by detecting a change in temperature of the liquid and indicates that the temperature reaches a predetermined value.

Description

technical field [0001] The present invention relates to a cooling trap unit that condenses or solidifies water, oil or the like gas molecules drifting in vacuum at a heat absorbing unit (cooling unit) of a refrigerator connected to a vacuum On a container or on a cooling part such as a cooling plate or block attached to the heat sink unit. In particular, the present invention relates to a cooling trap unit including a regenerative structure to remove trapped substances in a shorter time than conventional cases. Background technique [0002] In the cooling trap unit, a refrigerator cools a block-shaped or plate-shaped cooling plate made of metal or the like in a vacuum by a refrigerator to condense or solidify gas molecules of water or oil. When the amount of water or oil increases, the cooling plate must be regenerated by raising its temperature. As the regeneration method, the following method is conventionally carried out. [0003] After the operation of the refrigerato...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D8/00
CPCB01D53/265B01D8/00
Inventor 堀内久
Owner CANON ANELVA CORP
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