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Special gas supply and distribution device

A technology for distributing equipment and special gases, applied in gas/liquid distribution and storage, mechanical equipment, piping systems, etc., to achieve the effects of reducing user costs, convenient system integration, and fast transmission speed

Inactive Publication Date: 2009-06-03
上海创洁科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there is no company in China that can meet the needs of customers. For the products of large foreign companies (Air Liquide, BOC, etc.), domestic users have to pay high costs to buy them. With the continuous improvement of users' investment concepts, The cost is also becoming more and more important, and it is also hoped that domestic products with high reliability and relatively low cost can be developed to replace imported products.

Method used

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  • Special gas supply and distribution device

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Embodiment Construction

[0011] Below in conjunction with embodiment further illustrate the present invention:

[0012] Such as figure 1 As shown, a special gas supply and distribution equipment consists of gas source supply equipment 1, valves 21-24, pressure sensors 31, 32, front filter 41, rear filter 42, overflow detector 5, test port 6. Pneumatic angle valve 7, vacuum generator 8, gas cylinder 9, and non-dead valve 10. The gas source supply equipment 1 is connected to the valve 21 through the delivery pipeline, and the pressure sensor 31 is connected to the delivery pipeline in between; the valve 21 is connected to the delivery pipeline Connect the valve 22 and the valve 23, and connect the front filter 41 and the flow detector 5 on the conveying pipeline in between; connect the valve 22 to the test port 6; The sensor 32; the pneumatic angle valve 7 is connected to the rear section filter 42; the valve 24 is connected to the vacuum generator 8; the valve 21 is connected to the gas cylinder 9, an...

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Abstract

The invention provides a special gas supply and distribution device and relates to the transportation field of gas with high purity. The special gas supply and distribution device comprises a gas source supplying device (1), valves (21-24), pressure sensors (31, 32), a front segment filter (41), a back segment filter (42), an excess-flow detector (5), a testing port (6), a pneumatic corner valve (7), a vacuum generator (8), a gas cylinder (9) and an untight valve (10). With the specific gas transportation structure adopted, high purity and high cleanliness during the gas transportation are ensured, therefore, the device is safe and reliable. Digital signals are transported to PLC by adopting an RJ45 network wire to substitute analog signals which are used by a traditional control system in the past. The special gas supply and distribution device has the advantages of fast transportation speed, large volume, convenient integration and low cost.

Description

technical field [0001] The invention relates to the field of high-purity gas delivery, in particular to special gas supply and distribution equipment. Background technique [0002] The supply and distribution system of special gas is widely used in high-tech fields such as semiconductors. It provides a solid foundation for the orderly progress of the entire process, and its matching automatic monitoring system has many advantages such as safety and reliability, and is widely affirmed and respected by senior experts. In terms of operation, the tedious and repetitive human labor is replaced by computer calculation, which has achieved remarkable economic benefits. [0003] At present, with the large-scale development of high-tech industries such as semiconductors in China, the demand for special gas supply and distribution systems on the factory side is also increasing, and the requirements for system reliability are also getting higher and higher. At present, there is no com...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17D1/04F17D3/01
Inventor 刘岚峰卫洁凌晨华朱浩然徐敏燕
Owner 上海创洁科技有限公司
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