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Special gas supply and distribution device

A technology for distributing equipment and special gases, applied in gas/liquid distribution and storage, mechanical equipment, pipeline systems, etc., to achieve the effects of increased system capacity, reduced cost, and convenient system integration

Inactive Publication Date: 2013-06-19
上海创洁科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there is no company in China that can meet the needs of customers. For the products of large foreign companies (Air Liquide, BOC, etc.), domestic users have to pay high costs to buy them. With the continuous improvement of users' investment concepts, The cost is also becoming more and more important, and it is also hoped that domestic products with high reliability and relatively low cost can be developed to replace imported products.

Method used

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  • Special gas supply and distribution device

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Embodiment Construction

[0011] The present invention will be further described below in conjunction with examples:

[0012] Such as figure 1 As shown, a special gas supply and distribution equipment consists of gas source supply equipment 1, valves 21-24, pressure sensors 31, 32, front filter 41, rear filter 42, overflow detector 5, and test port 6. Pneumatic angle valve 7, vacuum generator 8, gas cylinder 9, non-dead valve 10, gas source supply equipment 1 is connected to valve 21 through the delivery pipeline, and the pressure sensor 31 is connected to the delivery pipeline in between; valve 21 is through the delivery pipeline Connect the valve 22 and the valve 23, connect the front filter 41 and the overflow detector 5 to the delivery pipeline between them; connect the valve 22 to the test port 6; connect the valve 23 to the pneumatic angle valve 7, and connect the delivery pipeline between the valve 24 and pressure The sensor 32; the pneumatic angle valve 7 is connected to the rear filter 42; the v...

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Abstract

The invention provides a special gas supply and distribution device and relates to the transportation field of gas with high purity. The special gas supply and distribution device comprises a gas source supplying device (1), valves (21-24), pressure sensors (31, 32), a front segment filter (41), a back segment filter (42), an excess-flow detector (5), a testing port (6), a pneumatic corner valve (7), a vacuum generator (8), a gas cylinder (9) and an untight valve (10). With the specific gas transportation structure adopted, high purity and high cleanliness during the gas transportation are ensured, therefore, the device is safe and reliable. Digital signals are transported to PLC by adopting an RJ45 network wire to substitute analog signals which are used by a traditional control system in the past. The special gas supply and distribution device has the advantages of fast transportation speed, large volume, convenient integration and low cost.

Description

Technical field [0001] The invention relates to the field of high-purity gas delivery, in particular to special gas supply and distribution equipment. Background technique [0002] Special gas supply and distribution systems are currently widely used in high-tech fields such as semiconductors. It provides a solid foundation for the orderly progress of the entire manufacturing process. Its fully automatic monitoring system has many advantages such as safety and reliability, and is widely recognized and praised by senior experts. In operation, tedious and repetitive human labor is replaced by computer operations, and significant economic benefits have been achieved. [0003] A few days ago, with the large-scale development of high-tech industries such as semiconductors in China, the demand for special gas supply and distribution systems from the factory side is also increasing, and the requirements for system reliability are also increasing. At present, there is no domestic company...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F17D1/04F17D3/01
Inventor 刘岚峰卫洁凌晨华朱浩然徐敏燕
Owner 上海创洁科技有限公司
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