Double-piezoelectric patch deformation reflection mirror with large-amplitude defocusing and astigmation calibration function
A technology of deformable mirrors and bimorphs, applied in optical components, optics, instruments, etc., can solve problems such as concerns and insufficient correction capabilities, and achieve low cost, outstanding correction capabilities, and easy-to-achieve effects
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[0025] The present invention will be described in detail below with reference to the drawings and specific implementations.
[0026] In this embodiment, a bimorph deformable mirror with both large-scale defocus and astigmatic aberration correction such as figure 1 As shown, the drive layer 12 and drive layer 13 made of two sheets of piezoelectric material are plated with conductive metal electrodes (usually copper or silver) on both sides, and then glued together; a piece of glass with a larger diameter (or The thin mirror layer 11 made of quartz, silicon, copper, etc.) is then bonded to it; a hollow cylindrical lens holder 17 also made of glass (or quartz, silicon, copper, etc.) has an inner diameter slightly larger than the diameter of the drive layer. Large, it is bonded to the lower surface of the mirror layer 11; this structure allows the edges of the drive layer 12 and the drive layer 13 to be relatively free to deform, which is beneficial to form a larger edge slope and th...
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