Acceleration measurement apparatus and method by using optical grating detection technology

Abstract

The invention discloses a novel device and a novel method for utilizing optical grating detection technology to measure acceleration, and belongs to the field of sensing detection. The device senses the acceleration through a mass block 1, wherein one end of the mass block 1 is connected to an anchor point 4 through an elastic beam 7, while the other end is connected with a movable grating strip 2 which forms an optical grating pair with a fixed grating strip 5. During work, incident light 6 irradiates on the optical grating pair, and the emergent light 3 of the incident light 6 is split into different diffraction levels. Under the action of the acceleration, the mass block 1 drives the movable grating strip 2 to generate certain displacement x so as to change the relative position between the movable grating strip 2 and the fixed grating strip 5, and cause the light intensity on different diffraction levels in the emergent light 3 to change correspondingly. Therefore, aiming at specific diffraction levels, input acceleration signals are reversely deduced according to the light intensity. The method and the device for measuring the acceleration have the advantages of low temperature drift, strong electromagnetic interference resisting performance, high sensitivity, and the like, and are suitable to be operated in abominable environment.

Description

technical field [0001] The invention belongs to the field of sensor detection, and in particular relates to an inertial measurement technology and a grating detection technology. Background technique [0002] At present, micro-accelerometers based on micro-electro-mechanical systems (MEMS) technology widely used in the market mainly adopt capacitive or piezoresistive detection mechanisms. However, the piezoresistive type is greatly affected by the ambient temperature and requires a complex temperature compensation circuit to ensure the accuracy of the test results; while the capacitive type is sensitive to environmental electromagnetic interference and requires a high-sensitivity capacitance detection circuit. [0003] In recent years, optical detection methods have been applied in the field of micro-accelerometers, which have the advantages of low temperature drift, excellent anti-electromagnetic interference performance, and potential high sensitivity, and can adapt to har...

AI Technical Summary

Problems solved by technology

However, the piezoresistive type is greatly affected by the ambient temperature and requires a complex temperature compensation circuit to ensure the accuracy of the test results; while the capacitive type is sensitive to environmental electromagnetic interference and requires a high-sensitivity capacitance detection circuit

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