Method for reducing dust in clean room, storage system and transfer device thereof

Abstract

The invention relates to a method for reducing dust in a clean room, a storage system and a transfer device thereof. The storage system includes rails, transfer devices, storage racks and spoilers. The transfer device can travel on the track, and it includes a base, a bearing body, a transmission part and a deflector. The carrying body is configured on the base. The transmission member is used to drive the base to move, and has a characteristic length D. The deflector has a plane and a guide slope, wherein the plane is arranged on the first height H, and 0.1D≤H≤9D. There is an angle θ between the guide slope and the plane, and the angle θ corresponds to the characteristic length D. The storage rack is arranged on one side of the track and has a storage space. The spoiler baffle is located below the storage space and is arranged on the second height h, and 0.025D≤h≤2.5D. The invention can prevent the dust or particles raised by the airflow caused by the moving of the transfer device from polluting the items on the storage rack.

Description

technical field [0001] The invention relates to an article transportation system, and in particular to a method for reducing dust in a clean room, a storage system and a transfer device thereof. Background technique [0002] In recent years, due to the gradual miniaturization of the line width of the semiconductor process, the requirements for the cleanliness of the process environment have also increased. In addition, in the process of semiconductor devices or display devices, it is necessary to transfer wafers or glass substrates between various tools for performing different semiconductor processes on the wafers or glass substrates. The current semiconductor factories and display panel factories all use automatic storage systems to replace manual handling to save manpower and process time. [0003] figure 1 It is a schematic diagram of the existing storage system. Please refer to figure 1 The storage system 100 includes a rail 110 , a transfer device 120 and a storage...

AI Technical Summary

Problems solved by technology

However, when the transfer device 120 moves at a high speed on the rail 110, its rollers 122 will rub against the rail 110 to generate particles in the surrounding environment, or raise particles originally attached to the floor or equipment, and these particles may damage the objects. Causes pollution, leading to a decline in the process pass rate of semiconductors and display devices

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