Comb condenser type dual-spindle accelerometer

Abstract

The invention relates to a comb capacitance type dual-axis accelerometer, which comprises a substrate; the substrate is provided with a sensitive mass block; the sensitive mass block is provided with fixing comb teeth respectively; movable comb teeth are also arranged between each periphery and corresponding fixing comb teeth of the sensitive mass block; four corners of the sensitive mass block are also connected with four support frames respectively; and the four support frames are symmetrical with the center of the sensitive mass block, and the other ends of the four support frames are connected to the substrate. The comb capacitance type dual-axis accelerometer has small volume and light weight, and can realize two-dimensional acceleration measurement with high sensitivity and resolution.

Description

Comb capacitive dual-axis accelerometer technical field The invention relates to the field of micromechanical sensors, in particular to a comb-tooth capacitance type biaxial accelerometer. Background technique An accelerometer is an inertial sensor capable of measuring the acceleration force of an object. The acceleration force is the force acting on the object when the object is accelerating. The acceleration force can be a constant, such as gravity, or it can be a variable. MEMS accelerometers are accelerometers manufactured using MEMS technology. Due to the use of micro-electro-mechanical system technology, the size of the accelerometer is greatly reduced, and a MEMS accelerometer is only a fraction of the size of a fingernail. MEMS accelerometers have the advantages of small size, light weight, and low energy consumption. MEMS accelerometers with mature technology can be divided into four types: piezoelectric, piezoresistive, capacitive, and thermal. Among them, t...

AI Technical Summary

Problems solved by technology

The purpose of the present invention is to provide a comb-tooth capacitive dual-axis accelerometer to solve the problems of poor stability, low precision, difficult processing, and low yield of accelerometers in traditional technology.

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