Improved sonic type micro mechanical scopperil

Abstract

The invention relates to an improved sonic type micro mechanical scopperil, which is formed by a first substrate, two groups of symmetrical grid fixed electrodes which are arranged on the first substrate and are used for detecting, a central anchor point and anchor points on two sides which are fixed on the first substrate and a second substrate hung above the first substrate, wherein the second substrate comprises two symmetrical driving mass blocks which have a same structure and are capable of vibrating along a driving direction, a first spring beam connected with the central anchor point and the driving mass blocks, a second spring beam connected with both sides of the anchor points and the driving mass blocks, a coupling spring beam connected with the two driving mass blocks, two symmetrical detection mass blocks which have the same structure and are capable of vibrating along the detection direction which is perpendicular to the driving direction and a connection spring beam between the detection mass blocks and the driving mass blocks. The scopperil is manufactured by employing microelectronic mechanical system technology. The scopperil works in atmospheric environment, and has the advantages of higher sensitivity and bandwidth.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical systems, and relates to a tuning fork micro-mechanical gyroscope, in particular to a tuning-fork micro-mechanical gyroscope with relatively high sensitivity and bandwidth. Background technique [0002] The micromechanical gyroscope is an inertial sensor that uses the Coriolis effect to detect the angular velocity of a rotating object. The micromechanical gyroscope is prepared by microelectronic machining technology, which has the advantages of low cost, small size, light weight, low power consumption, simple structure and process, and suitable for mass production. It is used in weapon guidance, aerospace, automobiles, consumer electronics and other fields. It has extremely broad application prospects. [0003] Most of the current micro-machined gyroscope products have low precision and are mainly used in the low-end and mid-range fields that do not require high precision. Improving the sens...

AI Technical Summary

Problems solved by technology

Due to the existence of a third vibration mode between the driving mode and the detection mode of the structure, the third vibration mode is coupled with the detection mode; because the O-shaped elastic beam 13 used is not well balanced The stiffness and flexibility of the vibrating system, resulting in some torsion of the structure; these factors lead to a reduction in sensitivity and bandwidth

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