Micro-electromechanical vector hydrophone

A vector hydrophone, micro-electromechanical technology, applied in radio wave measurement systems, instruments, measurement devices, etc., can solve problems such as overall performance improvement, and achieve the effects of increasing deformation range, reducing monitoring errors, and improving sensitivity

Inactive Publication Date: 2009-08-26
ZHONGBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem that the packaging structure of the existing vector hydrophone affects the improvement of its overall performance, the present invention provides a micro-electromechanical vector hydrophone with a new packaging structure

Method used

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  • Micro-electromechanical vector hydrophone
  • Micro-electromechanical vector hydrophone
  • Micro-electromechanical vector hydrophone

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Embodiment Construction

[0018] The microelectromechanical vector hydrophone includes a sensitive conversion microstructure, a support for fixing the sensitive conversion microstructure 1, a package shell that covers the sensitive conversion microstructure and is sealed and fixed with the support 1, the sensitive conversion microstructure is contained in The middle part of the semiconductor substrate is etched into a cross-shaped cantilever beam structure 2 with a density similar to that of water. The micro-column body 3 is vertically fixed in the center of the cross-shaped cantilever beam structure 2. The four-beam end of the glyph cantilever beam structure 2 is provided with a conversion element 4, and the packaging shell is a sound-transmitting rubber cap 5 made of a polyurethane potting material with high frequency, low attenuation and low water permeability through an acoustic potting process. The top of the acoustic rubber cap 5 is potted with polyurethane 6 which fixes the top of the micro-column 3...

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Abstract

The invention relates to a hydroacoustic transducer, in particular to a micro-electromechanical vector hydrophone which solves the problem that the enhancement of the overall performance is affected by the encapsulating structure of the existing vector hydrophone. The micro-electromechanical vector hydrophone comprises a sensitivity-conversion micro-structure, a support for fixing the sensitivity-conversion micro-structure, and an encapsulating housing covering the sensitivity-conversion micro-structure and hermetically fixing the support, wherein, the sensitivity-conversion micro-structure comprises a cross-shaped cantilever beam structure and a miniature cylindrical body vertically fixed in the center of the cross-shaped cantilever beam structure; conversion elements are arranged at the ends of the four beams of the cross-shaped cantilever beam structure; the encapsulating housing is a sound-transparent rubber cap made of polyurethane encapsulating materials; and polyurethane for fixing the top end of the miniature cylindrical body and the sound-transparent rubber cap is encapsulated at the top of the sound-transparent rubber cap. The invention increases the sensitivity of the hydrophone, improves the frequency response thereof and ensures the high signal-to-noise ratio at low frequencies by improving the encapsulating structure and replacing the conversion elements of the sensitivity-conversion structure, so that the hydrophone can show excellent performance.

Description

Technical field [0001] The invention relates to an underwater acoustic sensor, in particular to a microelectromechanical vector hydrophone. Background technique [0002] The vector hydrophone is an important part of sonar detection. Its performance is related to the sensitive conversion microstructure, weak signal extraction circuit, and the packaging structure adopted for the sensitive conversion microstructure to adapt to underwater work; among them, sensitivity and frequency Response is two very important indicators of a hydrophone. The sensitivity and frequency response directly affect the performance of the hydrophone. For example: the Chinese invention patent with the patent number "200610012991.0" discloses a "resonant tunneling bionic vector underwater acoustic sensor". The sensitive conversion microstructure of the vector underwater acoustic sensor is based on the nano-film resonance tunneling effect and uses micro-nano processing technology. It is manufactured, and its ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H11/00G01S7/521
Inventor 张文栋熊继军张国军薛晨阳张斌珍王建平关凌纲
Owner ZHONGBEI UNIV
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