Method for manufacturing substrate
A manufacturing method and substrate technology, applied in the field of substrate manufacturing, can solve the problems of light leakage, display quality degradation, deformation and the like of liquid crystal displays, and achieve the effect of avoiding offset
Inactive Publication Date: 2011-02-09
CHUNGHWA PICTURE TUBES LTD
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Problems solved by technology
Therefore, the substrate is likely to be deformed after being subjected to stress cutting, and the pixel array on the small-sized thin film transistor array substrate may be shifted in position
Regardless of the pixel array offset caused by the high-temperature annealing process or the dicing process, after the thin film transistor array substrate and the color filter substrate are aligned and assembled, the liquid crystal display will have light leakage, which will result in a decrease in display quality
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[0022] Figure 1A-1D is a top view of the manufacturing process of the manufacturing method of the substrate of the present invention, and figure 2 It is a schematic diagram of the steps of the manufacturing method of the substrate of the present invention. Please refer to Figure 1A and figure 2 , The manufacturing method of the substrate of the present invention mainly includes the following steps S1-S7. First proceed to step S1: provide a first mother substrate 100 having a plurality of array unit predetermined regions P. There are at least two first alignment marks M1 on the first motherboard 100 . What I want to explain here is that, Figure 1A Eight first alignment marks M1 are respectively located at the corners of the predetermined area P of each array unit. Of course, those skilled in the art can increase the number and positions of the first alignment marks M1 according to actual needs, and there is no intention to limit them here. The aforementioned first m...
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The invention discloses a method for manufacturing a substrate, which comprises the following steps of: firstly, providing a first parent substrate which at least has two first contraposition marks; secondly, measuring the distance between the first contraposition marks to obtain a first distance; thirdly, forming a plurality of array units on the first parent substrate; fourthly, dividing the first parent substrate and measuring the distance of the first contraposition marks to obtain a second distance; fifthly, calculating the difference between the first distance and the second distance toobtain a compensation value; sixthly, adjusting the distance between the first contraposition marks through the compensation value to form at least two contraposition marks on a second parent substrate; and finally, forming array units on the second parent substrate.
Description
technical field [0001] The present invention relates to a manufacturing method of a substrate, and in particular to a manufacturing method of an active element array substrate and a color filter substrate. Background technique [0002] The multimedia technology in today's society is quite developed, mostly benefiting from the progress of semiconductor components and display devices. As far as displays are concerned, liquid crystal display panels with superior characteristics such as high image quality, good space utilization efficiency, low power consumption, and no radiation have gradually become the mainstream of the market. The liquid crystal display panel is mainly composed of a thin film transistor array substrate and a color filter substrate in alignment, and a liquid crystal layer is sandwiched between the two substrates. [0003] Generally speaking, the manufacturing process of the thin film transistor array substrate is formed through several masking processes and ...
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IPC IPC(8): H01L21/66H01L21/78G02F1/136G02F1/1335G02F1/1333
Inventor 李仲明吴恒忠陈俊仁洪建兴黄坤源陈晋升
Owner CHUNGHWA PICTURE TUBES LTD