Thin film transistor (TFT) array substrate and manufacture method thereof

Abstract

The invention relates to a TFT array substrate and a manufacture method thereof. The method includes the steps of first forming a first patterned conducting layer comprising a plurality of scanning lines and a plurality of grid electrodes connected with the scanning lines on the substrate; then forming a patterned grid insulating layer with a plurality of open pores on the substrate so as to coverthe first patterned conducting layer and forming a plurality of dielectric patterns in the open pores; subsequently, forming a plurality of semiconductor patterns on the patterned grid insulating layer; after that, forming a second patterned conducting layer on the semiconductor patterns, the patterned grid insulating layer and the dielectric patterns; then forming a protective layer on the semiconductor patterns, the patterned grid insulating layer and the dielectric patterns; and finally forming a plurality of pixel electrodes on the protective layer. The invention can decrease the number of driving elements to achieve the purpose of reducing cost, simultaneously integrate the characteristic stability and high storage capacitance value of the TFT elements to satisfy the requirements onthe design of the elements, and also achieve the effect of lessening the number of photo masks.

Description

technical field [0001] The invention relates to a thin film transistor array substrate and a manufacturing method thereof, and in particular to a thin film transistor array substrate capable of improving resistance-capacitance delay (RC delay) and a manufacturing method thereof. Background technique [0002] With the advancement of display technology, people can make their lives more convenient with the assistance of displays. In order to achieve the characteristics of lightness and thinness of displays, flat panel displays (FPDs) have become the current mainstream. Among many flat panel displays, a liquid crystal display (LCD) has superior characteristics such as high space utilization efficiency, low power consumption, no radiation, and low electromagnetic interference. Therefore, the liquid crystal display is very popular among consumers. [0003] A liquid crystal display is mainly composed of an active matrix substrate, a color filter substrate and a liquid crystal layer...

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Problems solved by technology

Therefore, the gate insulating layer with the same dielectric constant in different regions cannot fully meet the design requirements.

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