Light irradiation device

Abstract

The present invention discloses an ultraviolet irradiation device (10) which ultraviolizes a shone thing while taking a semiconductor chip (W) stuck with a ultraviolet constrictive type adhesive film (S), and the invention can move on a casing (14) when set collected in a sliding mechanism (15); the casing (14) is provided with a ultraviolet irradiation unit (11), and the adhesive film (S) is ultraviolized as irradiated surface when the sliding mechanism (15) moves in the direction bestrides an irradiation port (12) of the casing (14); the casing (14) is provided with a switch mechanism (17) which follows movement of the sliding mechanism (15) to open an irradiation port (12).

Description

technical field [0001] The invention relates to a light irradiation device, in particular to a light irradiation device capable of efficiently irradiating light to an object to be irradiated. Background technique [0002] In a semiconductor wafer (hereinafter, simply referred to as "wafer") processing equipment, for example, a protective adhesive sheet is attached to the circuit surface of the wafer, and then the back surface is polished, or a dicing tape is attached, and the wafer is diced into multiple pieces. Chip singulation process. The adhesive sheet used in such a treatment uses an ultraviolet curable (photoreactive) adhesive, and after the above-mentioned treatment, the adhesive force is weakened by curing the adhesive with an ultraviolet irradiation device, Wafer peeling can thus be easily performed without damaging the wafer. [0003] Patent Document 1 discloses such an ultraviolet irradiation device, for example. The ultraviolet irradiation device in this docum...

AI Technical Summary

Problems solved by technology

[0005] However, in the ultraviolet irradiation device described in Patent Document 1, the adhesive of the adhesive sheet is hardened by ultraviolet rays that pass through the entire bottom area, that is, it is irradiated all at once or on the entire surface. The illuminance of the part far from the light source has to use a high-output lamp, and the power consumption will increase with the enlargement of the device, and the running cost will increase.

Therefore, when the planar area of ​​the object to be irradiated is large, a lamp capable of irradiating ultraviolet rays over a wide area corresponding to it is required, which will become a major cause of decreased versatility.

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