Manufacturing method of ceramic packaged sheet type quartz crystal frequency device
A manufacturing method, quartz crystal technology, applied in the direction of electrical components, impedance networks, etc., can solve the problems that affect the quality of finished products, the wafer cannot be positioned accurately, and the adhesive sticks to the wafer, so as to achieve airtightness without damage and improve The pass rate of the process and the effect of increasing the airtightness
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Embodiment 2
[0062] Such as image 3 As shown, in order to enlarge the vibration cavity, the upper cover plate of the frequency device is provided with an upper cover plate pit 4; the length and width of the upper cover plate pit 4 are greater than the length and width of the lower cover plate pit 5 .
[0063] Then, in the manufacturing method of this embodiment, step 1 further includes: making the upper cover plate 1 into a ceramic upper cover plate with m×n array pits by sandblasting;
Embodiment 3
[0065] In order to increase the vibration space below the wafer 3, the lower cover plate pit 5 of the quartz crystal frequency device of the present embodiment includes an upper pit 51 and a lower pit 52, and the length and width of the upper pit 51 are greater than that of the lower pit. The length and width of pit 52 (see Figure 4 ).
[0066] Then, in the manufacturing method of the chip quartz crystal frequency device of the ceramic package, the manufacturing of the lower cover plate 2 in the step 1 (2) includes forming a pit on the lower cover plate as the lower pit 52, and then forming an upper pit 52 again. Dimple 51 .
Embodiment 4
[0068] See Figure 5 , as an optimization scheme of embodiment 3, there are two protruding brackets 11 in the lower pit 52 of the chip quartz crystal frequency device of the ceramic package, and the height of the brackets 11 is less than the depth of the lower pit 52, and the brackets 11 The distance in the longitudinal direction is smaller than the length of the wafer 3 .
[0069] Then, during the preparation, the step 1 (2), in addition to all the steps included in Embodiment 3, also includes simultaneously forming two protruding brackets 11 in each lower recess 52 of the lower cover plate 2 .
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