Accurate position adjustment device and semiconductor on-line detection system with the device

Abstract

The invention discloses a precise position adjustment device, which comprises a mounting seat, a workbench, a transmission mechanism and a driving mechanism. One end of the shaft is fixedly connected to the workbench, and the other end is fixedly passed through the mounting plate and pivotally connected to the mounting seat. The plurality of transmission wheels are symmetrically distributed around the transmission shaft, and the drive wheels and the transmission wheels are located on the same plane. The radius of rotation of the workbench is greater than that of the drive wheel. The precise position adjustment device is easy to assemble and easy to maintain and replace. The drive wheel drives the mounting plate with the drive wheel fixed at the corner to rotate, thereby driving the workbench to rotate, so that the drive wheel and the workbench have the same linear speed and at the same time make the workbench It has a small angular velocity relative to the driving wheel, so that the table can run smoothly, accurately, and at a small angle. The invention also discloses a semiconductor on-line detection system with the device.

Description

technical field [0001] The invention relates to an accurate position adjustment device in a semiconductor process, in particular to an accurate position adjustment device in a vacuum chamber on a thin film semiconductor production line and a semiconductor on-line detection system with the device. Background technique [0002] In recent years, the thin-film semiconductor market has developed vigorously, which has gradually deepened the application of thin-film semiconductors, and its trend is towards large-scale expansion. For example, thin-film solar cell devices using glass substrates have developed to a size of 1100mm×1400mm as the common size, and organic light-emitting display devices ( OLED) panels have also expanded from traditional mobile phone screens to large-area TVs and portable computer displays, and their size has reached more than 370mm×470mm. Such thin-film semiconductor products need to go through many different coating processes or integration, such as Chemi...

AI Technical Summary

Problems solved by technology

However, with the gradual expansion of the size of semiconductors and the promotion of integrated system integration of various processes, it is often impossible to detect the quality of the coating film or the defects of each link in a timely manner. The subsequent coating process is useless, which will waste a lot of raw materials and energy, and is not conducive to troubleshooting

Many thin-film semiconductor processes need to be carried out in a vacuum environment, such as the coating process. The existing substrate carrying inspection platform is complex in design and difficult to manufacture. It uses a separate large sprocket or large pulley to cooperate with the workbench, and the processing and assembly are relatively complicated. It is inconvenient to repair and replace, and it is not easy to adjust the small angle

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