Translational grating light modulator and manufacture method and array thereof

Abstract

The invention relates to the technical field of light modulators, in particular to a grating light modulator and a manufacture method and an array thereof, wherein the translational grating light modulator comprises a silicon substrate and an insulation layer arranged on the silicon substrate; the grating is supported above the insulation layer in a suspending way by an elastic cantilever beam; the elastic cantilever beam consists of a beam body and an anchor rod; one end of the beam body is fixedly arranged on the insulation layer by the anchor rod, and the other end thereof is fixedly connected with the grating; the insulation layer arranged below the grating is provided with a lower electrode; and the beam body of the elastic cantilever beam has a folding structure. As for the translational grating light modulator, the beam body of the elastic cantilever beam has the folding structure, thus being capable of increasing the length of the beam body, reducing the elastic coefficient ofan equivalent beam, leading the grating to be relatively thickened and the rigidity thereof to be relatively increased, and reducing the down-pulling bending of the moveable grating, guaranteeing thegrating surface to be flat, and leading the switch of the grating light modulator to have better modulating effect.

Description

technical field [0001] The invention relates to the technical field of optical modulators, in particular to a grating optical modulator, a manufacturing method and an array thereof. Background technique [0002] MOEMS (Micro-Opto-Electro-Mechanical Systems) technology is a further fusion of MEMS (Micro-Electro-Mechanical Systems) technology and optical technology, with inherent advantages, it can realize micro-optical components The integration with the control circuit has the advantages of mass production, low unit cost, small size, fast response, and reliable performance. At present, optical modulators based on MOEMS technology have achieved high-speed development and wide application due to their excellent performance. Typical examples include the digital micromirror device DMD of Texas Instruments and the grating light valve GLV of Silicon Photonics. Projection display, adaptive optics, sensor, optical communication, and miniaturized optical platform have also been wide...

AI Technical Summary

Problems solved by technology

The MOEMS-based grating light modulator proposed by Chongqing University has achieved fruitful research results in the application of projection technology by using the principle of grating diffraction to realize optical modulation. The translational grating optical modulator disclosed in the Chinese invention patent of 200510020185.3, because the flatness of the grating surface has an important influence on its optical characteristics, and the cantilever beam of the existing translational grating optical modulator is a straight beam structure. When the grating is pulled down, it is easy to cause the grating to be distorted, which affects the flatness of the grating surface

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