This application discloses a
grating light valve array and its fabrication method. The
grating light valve array includes: a substrate; a one-dimensional
cantilever array disposed above the substrate, wherein the one-dimensional
cantilever array adopts a multi-row, multi-column
cantilever array, each row of the cantilever array includes multiple sets of cantilever pairs that are equally spaced and parallel to each other, and the number of cantilever pairs in each row of the cantilever array is the same, and multiple cantilever pairs in the same column of different rows are electrically connected sequentially; the absolute value of the difference between the overall horizontal length and the overall vertical length of the multi-row, multi-column cantilever array is less than a preset threshold; and a
driving circuit for applying
voltage to each cantilever pair to cause the cantilever pair to deform and generate a
height difference, wherein the
driving circuit applies the same
voltage to the cantilever pairs in the same column of different rows. The
grating light valve array and its fabrication method of this application can reduce the difficulty of focusing and spot shaping in
grating light valve illumination.