Reflecting type grating light valve and processing method thereof
A technology of a grating light valve and a processing method, which is applied in the directions of diffraction grating, optics, optical components, etc., can solve the problems of low optical efficiency and extinction of the grating light valve, small size of the grating strip, complicated processing technology, etc. Small spot size and high image quality
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[0040] In this embodiment, the number of movable grating bars is 512, the thickness of the silicon substrate 1 is 300 μm, the thickness of the silicon dioxide layer 2 is 0.6 μm, the thickness of the silicon nitride beam 4 is 200 nm, the width is 50 μm, and the length is 200 μm. The distance between the silicon oxide beam 4 and the silicon dioxide layer 2 is 1 μm, the thickness of the metal reflection layer 5 is 60 nm, the width is 50 μm, and the length is 200 μm, the distance between two adjacent movable grating bars is 1 μm, and the width of the slit 7 is It is 5 μm and the length is 30 mm. Experimental results show that the reflective grating light valve 10 of the embodiment of the present invention has a light efficiency of 75%, an extinction ratio of 50:1, and an operating frequency of 300 kHz.
[0041]The reflective grating light valve 10 of the embodiment of the present invention is applied to high-resolution laser engraving equipment as a multi-channel light modulation ...
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