Translational grating light valve Fourier spectrometer

A micro-spectrometer and grating light valve technology, which is applied in the direction of interference spectroscopy, spectrometry/spectrophotometry/monochromator, instruments, etc., can solve the problem of not being able to achieve full-spectrum measurement and high imaging quality requirements , Spectral surface bending and other problems, to achieve the effect of shortening the size of the optical path, improving the accuracy of the spectrum, and simplifying the structure of the optical path
CN102175327BActive Publication Date: 2012-09-26CHONGQING UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHONGQING UNIV
Publication Date
2012-09-26

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Abstract

The invention provides a translational grating light valve Fourier spectrometer, in which an MEMS technology, a spectrum analysis technology and a Fourier digital transform technology are used; a system comprises a light source, an imaging system, a programmable spatial light modulator array and a single detector; a wave surface from a laser wave surface to a modulator is divided, a portion of light is reflected from an upper surface while the other portion of light is reflected from a lower surface, and the two light beams are coherent light and interfere with each other; the altitude difference between the upper surface and the lower surface of the programmable spatial light modulator can be changed by electrostatic actuation, sequentially, the optical path difference of the coherent light is changed, and interference fringe modulation is implemented; the change of light energy is detected by the single detector, sample information is measured by the Fourier digital transform technology and an optical path difference correction technology; and a conventional light-splitting grating or ion beam splitter is unnecessary, a single device has the dual function of light splitting and gating, the system is simplified, and the light path is shortened, so that the spectrometer is more compact in structure and high in integrated level, and can be widely used in various production researches.
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Description

technical field

[0001] The invention relates to a translational grating light valve Fourier miniature spectrometer, more specifically, the invention uses the interference modulation of the translational grating light valve device to light to realize the analysis of the spectrum. Background technique

[0002] In recent years, micro-electromechanical systems (MOMES) have been greatly developed, and micro-mechanical components, micro-detection elements, etc. have reduced the structure of spectroscopic instruments. Spectrometers are developing in the direction of miniaturization, high integration and portability. The miniature near-infrared spectrometer mainly uses the highly integrated micro-optical path composed of MOMES devices, combined with the chemical measurement method and the weak signal detection method to realize the measurement and detection of substances. Because of its small size, low cost, no moving parts, fast and efficient, non-destructive testing, high reliabi...

Claims

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