Semipermeable membrane mask plate LCVD repair system
A mask plate and semi-permeable membrane technology, applied in the field of semi-permeable film mask plate LCVD repair system, can solve problems such as difficulties
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[0019] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. It should be noted here that the descriptions of these embodiments are used to help understand the present invention, but are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not constitute a conflict with each other.
[0020] Such as figure 1 As shown, a semi-permeable mask plate LCVD repair system, a laser 10, a grating light valve 14, a filter assembly 15, a vibrating mirror 16 and an objective lens assembly 18, the light source emitted by the laser 10 is shaped into a line light source, the The line light source is irradiated on the grating light valve 14 and reflected to form a uniform line light source. After the uniform line light source is irradiated on the vibrating mirror 16,...
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