Aspheric optical element surface shape detection device
A technology for optical element and surface shape detection, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of computational hologram processing, difficult assembly and adjustment, shorten the detection cycle, reduce the detection cost and improve the detection accuracy Effect
Active Publication Date: 2011-05-25
CHINA NORTH IND NO 205 RES INST
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[0003] The purpose of the present invention is to overcome the disadvantages of computational hologram processing and assembly difficulties in detecting the surface shape of aspheric optical elements with computational holographic technology, and to provide a method based on two-step phase shift technology, computational holographic technology and digital holographic interference technology. Aspherical optical element surface shape detection device to realize high-precision detection of aspheric optical element surface shape with large asphericity and large surface steepness
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[0015] The computer 12 is equipped with A / D converter, memory and aspheric surface shape measurement software package. The memory pre-stores the known parameters required during the operation of the aspheric surface shape measurement software package, these known parameters include the wavelength λ of the laser used, the distance d between the pinhole filter 3 and the beam splitter 4, and the area array CCD detection The number of pixels M×N and the pixel size Δx×Δy of the device 11. The aspheric surface shape measurement software package includes a control module, a storage module, a data acquisition module, a data input module, an ideal interference fringe parameter calculation module, a phase difference calculation module, a phase unwrapping module and a surface deviation calculation module. figure 2 .
[0016] The function of the control module is to control the piezoelectric ceramic 8 to generate a phase shift of π / 2, and to control the opening and closing of the first ...
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The invention discloses an aspheric optical element surface shape detection device. Based on prior interference method surface shape detection devices, the aspheric optical element surface shape detection device realizes the measurement of the light intensities of detection light waves and reference light waves by additionally arranging two controllable optical stops and can acquire phase shift interference fringes by additionally arranging piezoelectric ceramics. An aspheric surface shape measurement software package can conveniently acquire a phase offset between the surface shape and an ideal surface shape of an aspheric optical element to be detected by computing the phase offset between the surface shape to be detected and a standard surface shape of the aspheric optical element to be detected and the phase offset between the ideal surface shape and the standard surface shape of the aspheric optical element to be detected. Therefore, the aspheric optical element surface shape detection device can effectively solve the surface shape detection problem of aspheric optical elements with large offset without a practical processing computed hologram, thereby reducing detection cost, shortening detection cycle and improving detection accuracy.
Description
technical field [0001] The invention relates to the technical field of optical precision measurement, in particular to an aspheric optical element surface shape detection device capable of detecting large asphericity. Background technique [0002] Until now, the quantitative detection of the surface shape of aspheric optical elements is still a challenge in the field of optical metrology. The main reason is that there is no corresponding standard aspheric surface template for standard detection, resulting in too dense interference fringes in interference detection, which cannot satisfy the sampling theorem. Currently used solutions include sub-aperture splicing and compensation. The sub-aperture splicing method uses precise mechanical movement to detect different sub-areas of the aspheric optical element, and then stitches each detection result into the surface shape detection result of the entire aspheric optical element. The compensation method uses a compensation mirror...
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IPC IPC(8): G01B11/24
Inventor 范琦杨鸿儒黎高平
Owner CHINA NORTH IND NO 205 RES INST