Manipulator device for sealing heat treating device

Abstract

The invention discloses a manipulator device for sealing a heat treating device. The heat treating device comprises a plurality of loading layers for placing substrates, and a corresponding controllable door for loading objects to be heated is arranged at the top end of each loading layer; the manipulator device comprises two parallel guide rails which are horizontally arranged and are positionedat the front side and the back side of the heat treating device; two movable manipulators are vertically arranged on the parallel guide rails; a slide way and a supporting plate which can move up anddown along the slide way are arranged on each manipulator; a rotary driving motor is arranged at the tail end of each supporting plate; and vacuum adsorption holes are arranged on the supporting plates. The manipulator device for sealing the heat treating device, which is provided by the invention, has simple structure, can load the objects to be heated in a high density manner, and is convenientfor the maximization of the heat treating device without reducing the heat treating efficiency.

Description

[0001] This application is a divisional application of: [0002] Title of Invention: Sealing Heat Treatment Apparatus, Manipulator Apparatus, and Method for Hardening Substrates Thereof [0003] Application date: September 5, 2008 [0004] Application number: 200810042576.9 technical field [0005] The invention relates to a manipulator device, in particular to a manipulator device used in a sealing material heat treatment device. Background technique [0006] In the production process of most flat panel display devices, heat treatment devices are basically required. For these heat treatment devices, the structure of the existing sealing material heat treatment device is as follows: figure 1 As shown, a heating device 14 is arranged at the bottom of the frame 11, and a multi-layer loading layer 12 for placing substrates is placed at a certain interval on the heating device 14. Correspondingly, one side of the frame 11 is provided with a The controllable door 13 correspon...

AI Technical Summary

Problems solved by technology

[0008] Usually, flat-panel displays are produced in a clean room, so once the device is enlarged, the height of the clean room will increase correspondingly, causing the overall operating cost of the clean room to increase

If the height of the clean room is kept constant, it is necessary to reduce the number of layers of the loading layer and expand the structure of the interval between the loading layers, resulting in a decrease in the heat treatment efficiency of the heat treatment device

[0009] In order to solve the above problems, the Chinese patent with the publication number CN1967118 discloses a heat treatment device, which can load the object to be heated at a high density for heat treatment. However, in order to prevent the deformation of the substrate and bear a large weight at the same time, the number of sliding mechanisms required There are more supporting feet, which increases the complexity of the equipment, and the sliding mechanism at the entrance of the substrate will affect the insertion of the substrate, which will reduce the beat and affect the heat treatment efficiency; and in the display area of ​​the substrate where the supporting feet are set, due to the heat capacity Different, prone to display unevenness

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