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Capacitance manometers and methods relating to auto-drift correction

A pressure gauge and capacitance technology, which can be used in the measurement of fluid pressure using capacitance changes, the measurement of fluid pressure through electromagnetic elements, and the measurement of fluid pressure, which can solve problems such as inconvenience.

Active Publication Date: 2010-06-02
MKS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Any recording of the cumulative zero change of the manometer is also usually done manually, which is an inconvenient process
In fact, users generally only know there is a problem when a tool or system alerts them

Method used

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  • Capacitance manometers and methods relating to auto-drift correction
  • Capacitance manometers and methods relating to auto-drift correction
  • Capacitance manometers and methods relating to auto-drift correction

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Embodiment Construction

[0018] Aspects of the present disclosure relate to systems, methods, and devices useful for determining or predicting the need for zeroing (eg, zero reading calibration), maintenance, or replacement of capacitance manometers. Exemplary embodiments may include software or firmware with computer-executable code, such as suitable algorithms, according to the present disclosure.

[0019] figure 1 A capacitance manometer 100 that may be adapted to include automatic drift correction is shown. The pressure gauge 100 includes a housing 102 and a flexible diaphragm 104 disposed within the housing. The diaphragm divides the housing, thereby providing a measurement chamber 106 and a reference chamber 108 (with figure 1 The two parts 108a-b) shown in , enable the two chambers to hold fluids at different pressures. Diaphragm 104 comprises a flexible membrane, disc or plate that deflects when subjected to differential pressure, i.e., when different pressures are applied on opposite sides...

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PUM

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Abstract

Systems, methods, and apparatus, including software implementation, are disclosed providing drift prediction of output values for manometers. A signal or other indication may be provided for or in relation to a capacitance manometer when a servicing, replacing, and / or zeroing event is predicted or determined to be required, based on a history (e.g., timestamps) associated with previous zeroing events. Previously recorded timestamps can be curve fit with suitable functions to calculate or predict future maintenance, calibration, and / or replacement events for a manometer. Such signals or indications can be generated as an on-screen indication, and could also be available upon interrogation of the manometer via a digital communications link or system.

Description

technical field [0001] The present disclosure relates to pressure transducers, and more particularly to capacitive manometers with automatic drift correction. Background technique [0002] Pressure transducers have been employed in a variety of applications. One such transducer is a capacitance manometer, which provides accurate and precise pressure measurements of gases, vapors or other fluids. Applications include precise pressure measurement and high precision gas and vapor delivery systems, which have become very important in many industrial applications, such as in the semiconductor industry for wafer and chip manufacturing, but other applications are also known. Such fluid delivery systems also typically include, but are not limited to, devices such as mass flow controllers (MFCs) and mass flow verifiers (MFVs) to regulate and / or monitor gas and vapor flow. [0003] Capacitance manometers typically use a flexible diaphragm that forms or includes the electrode structu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/12G01L27/00
CPCG01L9/12G01L9/0072G01L19/02G01L27/00
Inventor P·沙利文D·阿尔卡伊德
Owner MKS INSTR INC