Furnace tube heat insulation device and furnace tube preventive maintenance method using same

Abstract

The invention discloses a furnace tube heat insulation device and a furnace tube preventive maintenance method using the same. The furnace tube heat insulation device is mounted in the furnace tube when an intake manifold is assembled or disassembled on a furnace tube base; the heat insulation device is a circular disk concave at one side, and the side wall of the device is provided with one or more openings. The heat insulation device is mounted in the furnace tube when the furnace is preventively maintained, thereby a furnace reaction chamber is divided into two parts from the mounting portion of the intake manifold on the furnace tube base, wherein the temperature of the part below a concave space of the heat insulation device is lower; with the action of the heat insulation device, heat of the part above the concave space cannot transmit to the below part, so that the intake manifold can be assembled or disassembled in the part below the concave space without heat resistance protection such as gloves and the like, and the cleanliness of each tube wall is further ensured.

Description

technical field [0001] The invention relates to the field of furnace tube maintenance, in particular to a furnace tube heat insulation device and a furnace tube preventive maintenance method using the device. Background technique [0002] The furnace tube system is widely used in the semiconductor field to provide the space environment required for the reaction in the manufacture of semiconductor devices. figure 1 A schematic structural diagram of a common furnace tube machine is shown. As shown in the figure, the furnace tube machine includes a heater 10, an outer tube 11 and an inner tube 12 to seal a certain number of wafers W in a reaction chamber 13, so as to provide a specific pressure and temperature reaction environment for the wafer W . Wherein the heater 10 is used for heating, so that the required temperature is reached in the reaction chamber 13; the outer pipe 11 is used for sealing the reaction chamber 13, and the inner pipe 12 is used for isolating the outer...

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Problems solved by technology

But it has the following disadvantages: the asbestos gloves are too thick to operate flexibly, and the asbestos fibers are easy to fall off and stick to the pipe wall (comprising the side wall of the inner pipe 12, the outer pipe 11 and the base 16) or stick to the intake manifold 17 and form pollution; in addition, two people are required to cooperate to complete the installation

Yet sheepskin glove can't persist for too long in high temperature environment, and glove is not easy to clean; Therefore pick up intake manifold 17 again with dust-free cloth pad on glove during operation sometimes; It is melted and sticks to the pipe wall to form pollution

[0005] In addition, the above method of disassembling and assembling the intake manifold 17 is also prone to the following disadvantages:

[0006] 1. The length of part intake manifold 17 is longer (for example exceeds 1000 millimeters), when loading into reaction chamber 13 or taking out from reaction chamber 13, because hand can only pinch the corner at the bottom of intake manifold 17, Stable operation cannot be achieved, so that the intake manifold 17 is very easy to hit the pipe wall and generate unfavorable particles

[0007] 2. After the intake manifold 17 is installed, the verticality needs to be adjusted. However, the intake manifold 17 may have been in contact with the pipe wall, so friction will be generated during the adjustment and unfavorable particles will be formed; in addition, there are sensory differences in the observation of the operator And the difficulty of observation, the difference in verticality installation caused by this will affect the reaction process in the reaction chamber 13

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