Micro electro mechanical system (MEMS) technology-based viscosity transducer chip and preparation method thereof
A technology of viscosity sensor and micro-electro-mechanical system, which is applied in the field of silicon micro-cantilever chip and its preparation based on MEMS technology, can solve the problems of bulky instruments, mostly analog signals, difficult cleaning, etc., and achieve high sensitivity and high measurement accuracy , output large effect
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[0016] The eigenfrequency of the rectangular beam 1, the triangular beam 2 and the U-shaped beam 3, the structure and preparation process of the MEMS triangular silicon micro-cantilever chip according to the present invention, and the working principle of the chip are described in more detail below in conjunction with the accompanying drawings.
[0017] refer to figure 1 , the eigenfrequencies of rectangular beam 1 and triangular beam 2 are:
[0018] f = 1 2 π K m * = 1 2 π Ebd 3 4 l 3 × 0.24 ρ s bld = ...
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