Automatic horizontal silicon substrate film producing device

Abstract

The invention relates to the field of solar energy application, in particular to an automatic horizontal silicon substrate film producing device. The device comprises a heating section, a vacuum transition section 1, a depositing section, a vacuum transition section 2 and a cooling section. An automatic gate valve is arranged between the working rooms; the heating section and the cooling section are anti-vacuum sections; the depositing section comprises a plurality of depositing modules; each depositing module comprise a depositing chamber, a vacuum transition chamber, a driving device, a position measuring device, a vacuumizing device, a distributing device and a discharging device; two depositing chambers are symmetrically or asymmetrically distributed on two sides of the vacuum transition chamber; each depositing chamber is connected with one drying pump; the depositing chamber and the vacuum transition chamber share a set of vacuumizing device; two ends of the depositing module are provided with two connecting devices which have a same size and shape or match with each other; and a continuous coating film depositing section is formed by connecting a plurality of parallel depositing modules by the connecting device. The device can change the number of the depositing modules according to the film coating technique and different demands of capacity design, and has wide application range, high producing efficiency and convenient maintenance.

Description

Technical field: [0001] The invention relates to the application field of solar energy, in particular to an automatic horizontal silicon-based film PECVD production device which adopts a modular design and can be flexibly adjusted according to customer requirements. Background technique: [0002] As we all know, the increasingly serious energy crisis and environmental pollution have greatly promoted the rapid development of the photovoltaic industry. In the photovoltaic cell family, silicon-based thin-film cells are not limited by the shortage of silicon raw materials and have unique low-light power generation performance. More and more investors in the field of photovoltaics are turning their attention to the production of silicon-based thin-film cells. [0003] In the manufacturing process of silicon-based thin film batteries, the most important manufacturing equipment is the PECVD deposition equipment used to deposit silicon-based thin films. This equipment manufacturing ...

AI Technical Summary

Problems solved by technology

However, the traditional flat-plate fractional continuous coating device has a low degree of automation and integration. The positions of each process room are relatively fixed and cannot be used alternately. If a process room in the middle fails or needs maintenance, the entire production process will be inte...

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