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Special baking oven for silicon material

A technology of oven and silicon material, which is applied in drying, drying machine, drying solid materials, etc., can solve the problems of silicon material drying and other problems, and achieve the effects of accelerated drying speed, smooth running path of hot gas, and simple structural design

Inactive Publication Date: 2010-06-23
EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the drying problem of silicon material in the production process of silicon rods, the invention provides a special oven for silicon material

Method used

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  • Special baking oven for silicon material
  • Special baking oven for silicon material
  • Special baking oven for silicon material

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Embodiment Construction

[0010] as attached figure 1 , figure 2 As shown, the special oven for silicon material of the present invention includes a thermal insulation shell 1, an inner tank 2, a heat passage 3, a heater 4, a circulation fan 5, a dehumidification fan 6, a dehumidification pipe 7, a humidity sensor 8 and a temperature Sensor 9, high-temperature air cavity 10, material rack 11, silicon material 12, liner 2 is placed in the heat preservation shell 1, and the top of the liner 2 is provided with a high-temperature air cavity 10, and the high-temperature air cavity 10 is formed by the top of the liner 2 It is combined with the top of the inner cavity of the thermal insulation shell 1, and the thermal air passage 3 is formed between the inner cavity of the thermal insulation shell 1 and the side of the inner tank 2. 32. The rear air duct 33 and the lower air duct 34 are composed of heaters 4 in the left air duct 31, right air duct 32, rear air duct 33 and lower air duct 34, and two circulat...

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Abstract

The invention relates to a special baking oven for a silicon material, comprising a thermal insulation shell, an inner container, a high temperature air cavity, a hot air duct, a heater, a circulating fan, a dehumidifier, a dehumidification pipe, a humidity sensor and a temperature sensor, wherein the high temperature air cavity is arranged on top of the inner container, the hot air duct is arranged around the inner container, the heater is arranged in the hot air duct, the circulating fan is arranged between the high temperature air cavity and the hot air duct, the dehumidifier is communicated with the inner chamber of the inner container, the humidity sensor and the temperature sensor are arranged to realize automation control of the baking oven, hot air in the baking oven can form backflow to facilitate full contact of hot air and silicon material, and the dehumidifier can discharge water vapor in the baking oven in time and form proper vacuum in the baking oven to reduce moisture vaporization temperature and improve baking speed. The invention has obvious energy-saving effect and can greatly reduce energy consumption and labor cost.

Description

Technical field: [0001] The invention relates to the technical field of semiconductor material drying, in particular to silicon material drying equipment. Background technique: [0002] With the continuous development of the semiconductor and solar energy industries, the demand for silicon materials is increasing. The purity of the silicon material is crucial to the quality of the final product. Some silicon materials have a lot of impurities on their surface, which must be removed by pickling and then cleaned. The cleaned silicon material must be dried before being put into the furnace to remove the moisture attached to the silicon material. The conventional method is to pack the silicon material in a turnover box and put it into an ordinary oven in a superimposed manner. The heater is set under the material box, and it is heated by electricity for drying treatment. The conventional oven is used for drying, which is located on the bottom layer. The silicon material in the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F26B9/06F26B3/02F26B21/00F26B25/22
Inventor 蒋新民
Owner EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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