The invention relates to a special baking oven for a silicon material, comprising a thermal insulation shell, an inner container, a high temperature air cavity, a hot air duct, a heater, a circulating fan, a dehumidifier, a dehumidification pipe, a humidity sensor and a temperature sensor, wherein the high temperature air cavity is arranged on top of the inner container, the hot air duct is arranged around the inner container, the heater is arranged in the hot air duct, the circulating fan is arranged between the high temperature air cavity and the hot air duct, the dehumidifier is communicated with the inner chamber of the inner container, the humidity sensor and the temperature sensor are arranged to realize automation control of the baking oven, hot air in the baking oven can form backflow to facilitate full contact of hot air and silicon material, and the dehumidifier can discharge water vapor in the baking oven in time and form proper vacuum in the baking oven to reduce moisture vaporization temperature and improve baking speed. The invention has obvious energy-saving effect and can greatly reduce energy consumption and labor cost.