Focus error signal correction system and method
A focus error signal and correction system technology, applied in the field of focus error signal correction systems, can solve problems such as SFE correction, signal error, and correction failure affecting the secondary focus error signal
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[0026] In order to achieve the above object, the present invention adopts the technical means and its effects, and now presents preferred embodiments, which are described as follows in conjunction with the accompanying drawings.
[0027] Please refer to image 3 , image 3 It is the focus error signal correction system 20 of the present invention. The calibration system 20 includes a main light receiving unit 21 , a first amplifier 22 , a gain unit 23 , a sub light receiving unit 24 , a second amplifier 25 , a control unit 26 , a calibration unit 27 and the like. Wherein the main light receiving part 21 is used for receiving reflected light, and generates the main focus error signal MFE through the first amplifier 22 . The main focus error signal MFE is firstly received by the control unit 26 , and after the signal is corrected by the control correction unit 27 , it is sent back to the control unit 26 and is amplified by the gain unit 23 with K value. Then, the secondary fo...
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