3d r/w cell with reduced reverse leakage and method of making thereof
A memory unit and component technology, applied in electrical components, digital memory information, instruments, etc., can solve problems such as difficulty in using chalcogenides
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[0018] It is known that the resistance of resistors formed from doped polycrystalline silicon or polycrystalline silicon can be trimmed by applying electrical pulses such that they are tuned between stable resistance states. Such trimmable resistors have been used as components in integrated circuits.
[0019] However, using trimmable polysilicon resistors in non-volatile memory cells to store data states is not a conventional approach. There are many difficulties in fabricating memory arrays of polysilicon resistors. If resistors are used as memory cells in a large cross-point array, there will be undesirable leakage in half-selected and unselected cells throughout the array when a voltage is applied to the selected cell. For example, refer to figure 1 , assuming that a voltage is applied between bit line B and word line A to set, reset or sense selected cell S. The desired current flows through the selected cell S. However, some leakage current may flow in alternate path...
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