TFT (Thin Film Transistor)-LCD (Liquid Crystal Display) array baseplate and manufacturing method thereof

Abstract

The invention relates to a TFT-LCD array baseplate and a manufacturing method thereof. The array baseplate comprises a grid wire and a data wire, wherein the grid wire and the data wire are formed on the baseplate, a pixel electrode and a thin film transistor are formed in a pixel region limited by the grid wire and the data wire, and the thin film transistor comprises a grid electrode, a grid insulating layer, a source electrode, a drain electrode, a doped semiconductor layer, a semiconductor layer and a passivation layer, wherein the grid electrode is formed on the baseplate, the grid insulating layer is formed on the grid electrode and covers the whole baseplate, the source electrode and the drain electrode are formed on the grid insulating layer, the doped semiconductor layer and the semiconductor layer are formed between the source electrode and the drain electrode in a transverse arrangement mode, and the passivation layer is formed on a structural graph. In the invention, the doped semiconductor layer and the semiconductor layer are arranged between the source electrode and the drain electrode in the transverse arrangement mode, thereby not only effectively reducing the internal segment difference and avoiding the rupture of a subsequently deposited thin film, but also reducing the thickness of the structural graph, reducing the box thickness and increasing the responsespeed of liquid crystals.

Description

technical field [0001] The invention relates to a thin film transistor liquid crystal display structure and a manufacturing method thereof, in particular to a TFT-LCD array substrate and a manufacturing method thereof. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) has the characteristics of small size, low power consumption, and no radiation. It has developed rapidly in recent years and occupies a dominant position in the current flat panel display market. The main structure of TFT-LCD includes an array substrate and a color filter substrate in a box, wherein gate lines, data lines, and thin film transistors and pixel electrodes arranged in a matrix are formed on the array substrate. [0003] Figure 32 It is a schematic structural diagram of a TFT-LCD array substrate in the prior art, and it is a typical back channel bottom gate structure. like Figure 32 As shown, the gate electrode 2 is formed on the substrate 1 and connect...

AI Technical Summary

Problems solved by technology

[0004]The actual use shows that the structure of the prior art that adopts the vertical stacking of each layer leads to a large internal step difference, which is easy to break the subsequent deposited film

In addition, this vertically stacked structure increases the thickness of the cell, which not only easily causes other defects, but also reduces the response speed of the liquid crystal

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