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Two-degree of freedom translation parallel decoupling micromotion platform

A technology of micro-movement platform and degrees of freedom, which is used in micro-manipulators, large-scale fixed members, metal processing mechanical parts, etc., can solve problems such as the inability to achieve complete decoupling of two-dimensional motion, and achieve compact structure, low processing cost, and high precision. Effect

Active Publication Date: 2010-10-20
江苏华航威泰机器人科技有限公司
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Problems solved by technology

However, the single parallel four-bar mechanism used in this technology has coupling displacement when moving, and cannot achieve complete decoupling of two-dimensional motion.

Method used

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  • Two-degree of freedom translation parallel decoupling micromotion platform
  • Two-degree of freedom translation parallel decoupling micromotion platform
  • Two-degree of freedom translation parallel decoupling micromotion platform

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Embodiment Construction

[0019] The embodiments of the present invention will be described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention. Detailed implementation modes and specific operation procedures are given, but the protection scope of the present invention is not limited to the following implementations. example.

[0020] Such as figure 1 with figure 2 As shown, this embodiment includes: a piezoelectric ceramic driver 1, two identical drive branches 8 and 11 and their corresponding two identical auxiliary branches 9 and 10, a working platform 7 and a fixed frame 2, in which: The auxiliary branches 9, 10 and the driving branches 8, 11 are symmetrically distributed on the four plane coordinate axis directions of the working platform 7 X+, X-, Y+, and Y-.

[0021] The drive branch 11 includes: input decoupling platform 14, drive branch intermediate platform 12, primary drive hinge intermediate platform 3, secondary drive hinge intermed...

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Abstract

The invention relates to a two-degree of freedom translation parallel decoupling micromotion platform in the technical field of micro electro mechanical systems. The micromotion platform comprises a piezoelectric ceramic driver, two driving branch chains and corresponding auxiliary branch chains thereof, a working platform and a fixed stand, wherein the two driving branch chains and the corresponding auxiliary branch chains thereof are respectively symmetrically distributed in the X direction and the Y direction of the working platform pairwise. The invention achieves the functions of eliminating coupling and parasitic displacement and realizes the two-dimension movement of the motion platform by the decoupling function and the rigidity characteristic of a compound double-parallel straight panel hinge and the symmetrical characteristic of the whole structure of the platform.

Description

Technical field [0001] The invention relates to a device in the technical field of micro-electromechanical systems, in particular to a two-degree-of-freedom translational parallel decoupling micro-motion platform based on a piezoelectric ceramic driver and a flexible hinge. Background technique [0002] In the fields of microelectromechanical systems, scanning probe microscopes, ultra-precision processing, optical component manufacturing, and biomedical engineering, micro-motion platforms with nanometer precision are the core components. At present, most of them use flexible hinge motion tables with piezoelectric ceramic drivers. At present, the commonly used two-degree-of-freedom micro-motion platforms in commercial use mostly use two one-dimensional motion platforms to be vertically stacked together or in series to nest a motion platform in one direction in another direction platform to achieve two-dimensional movement. However, the two-dimensional micro-motion platform with ...

Claims

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Application Information

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IPC IPC(8): B23Q1/44B25J7/00
Inventor 朱利民赖磊捷谷国迎李朋志
Owner 江苏华航威泰机器人科技有限公司
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