Variable optical attenuator and preparation method thereof
A technology of variable light and light attenuation, applied in optical components, instruments, optics, etc., can solve problems such as the difficulty of variable light attenuation devices, and achieve the effects of low packaging difficulty and cost, simple process, and extensive functions
Active Publication Date: 2012-07-18
PEKING UNIV
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Problems solved by technology
However, there are huge difficulties in manufacturing high-reliability, low-cost variable optical attenuation devices that are suitable for occasions that require high device reliability in vibration environments
As far as the current situation is concerned, the attenuation of optical fiber optical signals is still achieved by driving the reflective surface through movable parts (such as electrostatic comb drive or thermal drive) all over the world, which requires high reliability for devices working in vibration environments. occasions, the current technology is still difficult to meet
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[0029] The variable optical attenuation device proposed by the present invention and its preparation method are described in detail below in conjunction with the accompanying drawings and embodiments.
[0030] As shown in Figures 1-3, a variable light attenuation device according to an embodiment of the present invention includes: a silicon base 1 and a glass base 3 bonded to the silicon base 1, the silicon base 1 is provided with a vertical light reflection Surface 11, and the heating cavity 12 with the light reflecting surface 11 as a side, the heating cavity 12 and the part of the upper surface of the glass base 3 form a sealed cavity, which belongs to the upper surface of the glass base 3 of the sealed cavity A heating component 2 is provided, and the heating component 2 is made of metal or alloy material, and its heating method is resistive heating. In order to increase its length, the heating component 2 is folded in multiple directions. When deformed, the light reflecti...
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Abstract
The invention relates to a variable optical attenuator and a preparation method thereof. The variable optical attenuator comprises a silicon base and a glass base bonded with the silicon base, wherein the silicon base is provided with a heating hollow cavity and a vertical light reflecting surface as one lateral surface of the heating hollow cavity; the heating hollow cavity and part of the uppersurface of the glass base stand in a circle to form a closed cavity; and a heating component is arranged on the upper surface of the glass base in the closed cavity. Accordingly, the variable opticalattenuator of the invention is capable of meeting the requirement for the reliability of components in the vibration environment and has the advantages of low cost and high performance.
Description
technical field [0001] The invention relates to the technical field of Micro Electro Mechanical Systems (MEMS) optical switches, in particular to a variable light attenuation device without moving parts and a preparation method thereof. Background technique [0002] The optical switch realized by MEMS technology has the advantages of small size, light weight, low energy consumption and stable performance. With the rapid development of optical fiber communication technology and dense wavelength division multiplexing system, MEMS variable optical attenuator, as an important optical waveguide device, has been more and more widely used. There have been many reports on the research on MEMS optical attenuators. [0003] The variable optical attenuation device, which is suitable for occasions requiring high reliability of the device in a vibration environment, is a key technology that needs to be broken through in the development of the current MEMS optical switch technology. Var...
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IPC IPC(8): G02B26/08B81C1/00
Inventor 吴文刚陈庆华杜博超张海霞郝一龙
Owner PEKING UNIV