Electrode structure for improving speed and efficiency of MZI (Math-Zehnder Interferometer) electro-optic modulator

A technology of electro-optical modulator and electrode structure, which is used in instruments, optics, nonlinear optics, etc.

Inactive Publication Date: 2011-01-05
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the traditional MZI electro-optic modulator structure, the optical phase on one modulation arm is generally adjusted through the action of carriers, and the modulation effic

Method used

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  • Electrode structure for improving speed and efficiency of MZI (Math-Zehnder Interferometer) electro-optic modulator
  • Electrode structure for improving speed and efficiency of MZI (Math-Zehnder Interferometer) electro-optic modulator
  • Electrode structure for improving speed and efficiency of MZI (Math-Zehnder Interferometer) electro-optic modulator

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Embodiment Construction

[0017] see figure 1 and figure 2 As shown, the present invention relates to an electric drive method and an electrode structure thereof that can increase the modulation efficiency while increasing the modulation speed in the electro-optic modulator for regulating the carrier concentration of the MZI-type ridge optical waveguide, including:

[0018] An MZI modulator structure, including first and second modulation arms 10, 10', the first and second modulation arms 10, 10' are ridge optical waveguide structures, and the first and second modulation arms 10, 10' are divided into The first and second flat plate regions 11, 11' and the first and second inner ridge regions 12, 12', the first and second flat plate regions 11, 12 on both sides of the first and second inner ridge regions 12, 12' 11' respectively have first, second, third and fourth doped regions 111, 112, 111', 112', wherein the first, second, third and fourth doped regions 111, 112, 111', The doping of 112' is N+ re...

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Abstract

The invention relates to an electrode structure for improving the speed and the efficiency of an MZI (Math-Zehnder Interferometer) electro-optic modulator, comprising an MZI modulator structure. The MZI modulator structure comprises a first modulation arm, a second modulation arm and a high-frequency driving circuit, wherein the first modulation arm and the second modulation arm are in crestiform light guide structure and respectively comprise a first flat area, a second flat area, a first inner ridge area and a second inner ridge area, the first flat area and the second flat area at both sides of the first inner ridge area and the second inner ridge area are respectively provided with a first doping area, a second doping area, a third doping area and a fourth doping area which are in PIN (Personal Identification Number) electric modulation structure when in the first flat area and the second flat area, the second doping area and the third doping area which are adjacent to the inner sides of the first modulation arm and the second modulation arm are connected together with a metal lead to form a first electrode of the high-frequency driving circuit, and the first doping area and the fourth doping area are connected together with a metal lead to from a second electrode of the high-frequency driving circuit, both ends of which are respectively connected with the first electrode and the second electrode of the high-frequency driving circuit.

Description

technical field [0001] The invention relates to an electric driving mode and an electrode structure capable of improving the response speed and modulation efficiency of an electro-optical modulator for controlling the carrier concentration of an MZI ridge optical waveguide. Background technique [0002] For highly symmetric crystals (such as silicon), electro-optic modulation generally utilizes carrier absorption, or utilizes the plasmonic dispersion effect in which the carrier concentration affects the refractive index of the material. The Mach-Zehnder Interserometer (MZI) refers to: first divide the light and other energy input into the optical waveguide into two beams and enter two different optical waveguide modulation arms, where the plasma dispersion effect is used to adjust a The phase of the beams of light makes the two beams of combined beams enter the output optical waveguide in equal phase or produce a π phase shift difference, so that the output optical waveguide...

Claims

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Application Information

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IPC IPC(8): G02F1/025
Inventor 程勇鹏陈少武
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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