Multistation gradient film coating equipment

A multi-station, thin-film technology, used in sputtering, ion implantation, vacuum evaporation, etc., can solve the problem of uneven deposition of film materials, and achieve the effect of eliminating radial disturbances

Inactive Publication Date: 2011-03-16
SHENYANG ACAD OF INSTR SCI
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Problems solved by technology

[0006] In order to achieve the above object, the present invention is achieved in this way: a multi-station gradient film coating equipment, which includes a drive module, a substrate, a workpiece disk, a mask mechanism and Uniform mechanism; the workpiece disk is located on the substrate; the workpiece disk can rotate around its axis, and the distance between it and the substrate is constant; a coating station i

Method used

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Embodiment Construction

[0024] see figure 2 and image 3 As shown, the multi-station gradient film coating equipment includes a drive module, a substrate 8, a workpiece disk 7, a mask mechanism 10 and a uniform mechanism 11; the workpiece disk 7 is located on the substrate 8; the workpiece disk 7 can be Rotate around its axis, and the interval between it and the substrate 8 is constant; on the workpiece disk 7, a coating station 13 is fixed; on the substrate 8, a coating hole is provided corresponding to the position of the coating station; A mask mechanism 10 is fixed between the coating station and the coating hole 12; a uniform mechanism 11 is fixed on the substrate 8 at the bottom of the coating hole 12; the working end of the driving module is fixedly connected to the workpiece disk 7 . The driving module of the present invention includes a motor 1 , an elastic coupling 5 and a workpiece disk adapter 6 ; the output shaft of the motor 1 is fixedly connected to the workpiece disk adapter 6 thro...

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Abstract

The invention belongs to the field of vacuum coating equipment, in particular relating to a multistation gradient film coating equipment, which comprises a driving module, a base plate (8), a workpiece disc (7), a mask mechanism (10) and a balancing mechanism (11), wherein the workpiece disc (7) is arranged on the base plate (8), can rotate around the axis thereof, and has a constant gap with the base plate (8); the workpiece (7) is fixedly provided with a coating station; a coating hole is arranged on the position of the base plate (8) corresponding to the coating station; the mask mechanism (10) is fixedly arranged between the coating station and the coating hole; the balancing mechanism (11) is fixedly arranged on the base plate (8) at the lower part of the coating hole; and the working end of the driving module is fixedly connected with the workpiece disc (7). The coating equipment of the invention can realize steady and accurate rotation transformation for stations (chips to be coated), and improve the product quantity coated by single vacuumization, thus improving the production efficiency of the whole system.

Description

technical field [0001] The invention belongs to the field of vacuum coating equipment, and in particular relates to a multi-station gradient film coating equipment. Background technique [0002] The variable density film is a kind of energy splitting element, which can attenuate and adjust the optical signal. It has the advantages of simple structure, wide wavelength range and good neutrality. It is widely used in various optical instruments and optical experiments. [0003] In order to achieve a specific energy attenuation effect, the optical density of the variable density sheet changes with the position, that is, the thickness of the film layer changes with the position. Commonly used variable density tablets are classified according to the change of optical density with position, usually can be divided into six types: circular gradient density tablets, strip gradient density tablets, circular stepped density sheets, strip stepped density sheets, "bull's eye " Density Fl...

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Application Information

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IPC IPC(8): C23C14/22C23C14/04
Inventor 张勇喜金秀杨文华李野阴晓俊赵帅锋赵珑现
Owner SHENYANG ACAD OF INSTR SCI
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