Digital electro-hydraulic servo pump-controlled ultra-precision hybrid bearing and ultramicro feeding mechanism

Abstract

The invention discloses a digital electro-hydraulic servo pump-controlled ultra-precision hybrid bearing and ultramicro feeding mechanism, which comprises a first oil supply system for supplying oil to a main shaft structure and a second oil supply system for supplying the oil to front centering static pressure bearings in the main shaft structure, wherein the main shaft structure is provided with a main shaft, front centering hybrid bearing sleeves sleeved to the front end of the main shaft, rear centering hybrid bearing sleeves sleeved to the rear end of the main shaft, and a static pressure thrust bearing and a flange which are arranged at given positions of the front end of the main shaft; the inner circumference of each of the front centering hybrid bearing sleeves and the rear centering hybrid bearing sleeves is uniformly provided with four pressure bearing grooves and four return chutes; the four pressure bearing grooves of the rear centering hybrid bearing sleeve are supplied with the oil by the first oil supply system; two vertical pressure bearing grooves of the front centering hybrid bearing sleeve are supplied with the oil by the first oil supply system, and two horizontal pressure bearing grooves of the front centering hybrid bearing sleeve are supplied with the oil by the first and second oil supply systems respectively; the four return chutes of each of the front centering hybrid bearing sleeves and the rear centering hybrid bearing sleeves are communicated with an oil tank; and the static pressure thrust bearing is supplied with the oil by the first oil supply system.

Description

Technical field [0001] The invention belongs to a dynamic and static pressure bearing, and particularly relates to an ultra-precision dynamic and static pressure bearing and an ultra-micro feeding mechanism controlled by a digital electro-hydraulic servo pump capable of improving the rotation accuracy of a main shaft. Background technique [0002] Due to the characteristics of low friction, long service life, good anti-vibration performance, and high precision, dynamic and static pressure bearings have been widely used in machine tool spindles. However, with the development of industrial technology, especially the development of national defense industry and aviation industry, The requirements for spindle rotation accuracy are getting higher and higher, and conventional hydrostatic and hydrostatic bearings can no longer meet the needs. Therefore, it is necessary to develop hydrostatic and hydrostatic bearings with higher rotation accuracy (spindle radial runout 0.0001~0.000001mm)....

AI Technical Summary

Problems solved by technology

[0002] Due to the characteristics of low friction, long service life, good anti-vibration performance and high precision, dynamic and static pressure bearings are widely used in machine tool spindles. However, with the development of industrial technology, especially the development of national defense industry and aviation industry, The requirements for the rotation accuracy of the main shaft are getting higher and higher, and the conventional dynamic and static pressure bearings can no longer meet the needs. Therefore, it is necessary to develop dynamic and static pressure bearings with higher rotation accuracy (the radial runout of the main shaft is 0.0001 ~ 0.000001mm)

At the same time, in ultra-precision machining, a fine feed of 0.0001 to 0.000001mm is required, which cannot be accomplished by the existing conventional feed mechanism.

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