Talbot effect-based aspheric surface detection system

Abstract

The invention discloses a Talbot effect-based aspheric surface detection system, which comprises a semiconductor laser, a micro objective, an autocollimator objective, a first reflector, a second reflector, an aspheric mirror to be detected, a dispersion prism, a first optical grating, a second optical grating, a frosted glass plate, a charge coupled device (CCD) camera, an image acquisition card and a computer. A light beam emitted from the semiconductor laser is collimated and expanded by the micro objective and the autocollimator objective, is incident into a certain sampling position of the aspheric mirror to be detected after being turned by the first reflector and the dispersion prism, and is incident into the first optical grating by the dispersion prism after being reflected by the second reflector to form a Talbot image at a Talbot distance thereof; simultaneously, the second optical grating is arranged at the position of the Talbot image, and the Talbot image of the first optical grating and the second optical grating form a Moire fringe; the CCD camera and the image acquisition card acquires the displacement of the Moire fringe; and the computer reconstructs an aspheric surface by wavefont fitting. The Talbot effect-based aspheric surface detection system has a simple structure, and can realize the high-accuracy detection of the aspheric mirrors with large apertures or relatively steeper surfaces.

Description

technical field [0001] The invention belongs to the field of optical testing, in particular to an aspheric detection system utilizing the Taber effect. Background technique [0002] In the fields of space optics, astronomy and military affairs, optical systems with aspheric mirrors as key components are playing an increasingly important role, and the required aspheric mirrors have larger and larger calibers. The manufacture of large-aperture aspheric mirrors requires corresponding detection technology, but there are still many difficulties in high-precision detection. The current popular aspheric detection technology is mainly based on the principle of light interference, and a compensating mirror needs to be installed in the entire interference system. However, with the increase of the aspheric aperture, the required compensation mirror will become more and more complicated, and it will also greatly affect the detection accuracy. In particular, for aspheric mirrors with r...

AI Technical Summary

Problems solved by technology

However, with the increase of the aspheric aperture, the required compensation mirror will become more and more complicated, and it will also greatly affect the detection accuracy.

In particular, for aspheric mirrors with relatively steep surfaces, existing interference detection methods cannot accurately obtain interference fringes due to various principles and technical limitations, so they cannot detect

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