Talbot effect-based aspheric surface detection system

A detection system and aspheric surface technology, which is applied in the field of optical testing, can solve the problems of affecting the detection accuracy, complicating the compensation mirror, and not being able to accurately obtain interference fringes, etc., and achieve good application prospects, high precision, and automatic detection and data processing. Effect

Inactive Publication Date: 2011-03-30
ZHEJIANG UNIV
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Problems solved by technology

However, with the increase of the aspheric aperture, the required compensation mirror will become more and more complicated, and it will also greatly affect the detection accuracy.
In particular, for as...

Method used

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  • Talbot effect-based aspheric surface detection system
  • Talbot effect-based aspheric surface detection system
  • Talbot effect-based aspheric surface detection system

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Embodiment Construction

[0014] The purpose and effects of the present invention will become more apparent by referring to the accompanying drawings in detail of the present invention.

[0015] Such as figure 1 As shown, the aspheric surface detection system based on the Taber effect of the present invention includes a semiconductor laser 1, a microscopic objective lens 2, a collimating objective lens 3, a first reflector 4, a second reflector 5, an aspheric mirror to be tested 6, and a beam splitting prism 7 , the first grating 8, the second grating 9, the ground glass plate 10, the CCD camera 11, the image acquisition card 12, the computer 13 and the light baffle 14, the light beam that the semiconductor laser 1 sends is collimated and expanded by the microscopic objective lens 2 and the collimating objective lens 3 After the beam, it is irradiated to the first reflector 4, and the reflected beam of the first reflector 4 is divided into two beams by the dichroic prism 7, and the aspheric mirror 6 to...

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Abstract

The invention discloses a Talbot effect-based aspheric surface detection system, which comprises a semiconductor laser, a micro objective, an autocollimator objective, a first reflector, a second reflector, an aspheric mirror to be detected, a dispersion prism, a first optical grating, a second optical grating, a frosted glass plate, a charge coupled device (CCD) camera, an image acquisition card and a computer. A light beam emitted from the semiconductor laser is collimated and expanded by the micro objective and the autocollimator objective, is incident into a certain sampling position of the aspheric mirror to be detected after being turned by the first reflector and the dispersion prism, and is incident into the first optical grating by the dispersion prism after being reflected by the second reflector to form a Talbot image at a Talbot distance thereof; simultaneously, the second optical grating is arranged at the position of the Talbot image, and the Talbot image of the first optical grating and the second optical grating form a Moire fringe; the CCD camera and the image acquisition card acquires the displacement of the Moire fringe; and the computer reconstructs an aspheric surface by wavefont fitting. The Talbot effect-based aspheric surface detection system has a simple structure, and can realize the high-accuracy detection of the aspheric mirrors with large apertures or relatively steeper surfaces.

Description

technical field [0001] The invention belongs to the field of optical testing, in particular to an aspheric detection system utilizing the Taber effect. Background technique [0002] In the fields of space optics, astronomy and military affairs, optical systems with aspheric mirrors as key components are playing an increasingly important role, and the required aspheric mirrors have larger and larger calibers. The manufacture of large-aperture aspheric mirrors requires corresponding detection technology, but there are still many difficulties in high-precision detection. The current popular aspheric detection technology is mainly based on the principle of light interference, and a compensating mirror needs to be installed in the entire interference system. However, with the increase of the aspheric aperture, the required compensation mirror will become more and more complicated, and it will also greatly affect the detection accuracy. In particular, for aspheric mirrors with r...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 金晓荣李遥白剑侯西云
Owner ZHEJIANG UNIV
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