Device and method for centering nozzle and wafer
A centering device and spray nozzle technology, applied in the direction of liquid cleaning method, chemical instrument and method, cleaning method and utensils, etc., to avoid personal safety hazards and facilitate replacement
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[0029] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0030] like figure 1 As shown, it is a schematic structural diagram of a centering device for an injection nozzle and a wafer carrier according to an embodiment of the present invention, the device includes: a wafer loading module, a position detection module, a parameter setting module and a position adjustment module,
[0031] The wafer loading module is a disk with the same outer diameter as the outer diameter of the wafer, and is used for loading wafers;
[0032] The position detection module is placed on the wafer loading module, and is used to identify the position and contour of the nozzle in real time, obtain the position and contour data of the nozzle, and send t...
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