Light scanning apparatus
A technology of optical scanning and equipment, applied in optics, optical components, installation, etc., can solve the problem of silicon mirror flatness reduction and other problems
Inactive Publication Date: 2011-06-15
SHINANO KENSHI
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Problems solved by technology
Therefore, the flatness of the silicon mirror will be reduced
Method used
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In the light scanning apparatus, flatness of a mirror section can be improved. The light scanning apparatus comprises: a substrate having an opening part; a mirror section being located in the opening part of the substrate, the mirror section having side parts, which are held by a beam; and a vibration source being provided on the substrate, the vibration source bending the substrate so as to swing the mirror section on the beam which acts as a pivot shaft. The mirror section swung by the vibration source reflects an irradiated light for scanning operation. The mirror section is constituted by a metal base plate and a mirror surface member, which is bonded to the metal base plate by an elastic adhesive.
Description
light scanning device technical field The present invention relates to an optical scanning device in which a scanning operation is performed by reflecting a light beam irradiated by a light source with a rocking mirror part. Background technique An optical scanning device that scans with a light beam, such as a laser beam irradiated from a light source, is used in optical instruments such as laser printers, imaging units of digital copiers, image projectors, barcode readers, area sensors. A conventional optical scanning device is explained below. A rectangular substrate made of, for example, stainless steel or silicon, having an open portion at its free end, is held by a holding member such as a cantilever. A mirror member is provided at the opening portion, and both ends thereof are connected to the base by one or more beams. The surface of the mirror member is polished to a mirror surface, and reflective paint is formed on the surface of the mirror member, or a mirror...
Claims
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Login to View More IPC IPC(8): G02B26/10G02B7/182
CPCG02B26/105
Inventor 岩崎友哉
Owner SHINANO KENSHI
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