MEMS devices
A device and component technology, applied in the field of packaging device formation, can solve the problems of time-consuming, expensive non-customized parts, etc.
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[0038] The present invention proposes a method of manufacturing a MEMS device, wherein a closed cavity is formed on said MEMS device element. A sacrificial layer is used, which is removed through the holes in the cover layer. The pores are then closed by an annealing process.
[0039] figure 1 The method of the invention is schematically shown.
[0040] figure 1 a shows a complete surface micromechanical device, in this example in the form of a resonator. The device comprises a silicon substrate 10 ; a silicon oxide layer 12 forming a cavity beneath the resonator mass; and the resonator mass 14 formed in a silicon layer 16 .
[0041] The present invention does not require changes to the fabrication of the MEMS device, and any conventional technique may be used. For example, the MEMS device may be a resonator, capacitor or switch. Typically the device has movable parts which need to be carefully protected by packaging, in this example the device has a suspended resonator ...
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