MDOF (multiple degree of freedom) coarse motion workpiece platform

Abstract

The invention provides an MDOF coarse motion workpiece platform, which includes two Y-direction linear motors, a crossbeam arranged between the two Y-direction linear motors, an X-direction micromotion motor, a connecting plate and an X-direction motor; the X-direction micromotion motor is arranged on one side of one Y-direction linear motor and is parallel to the Y-direction linear motor, and the X-direction micromotion motor is connected with the Y-direction linear motor through the connecting plate; one end of the crossbeam is connected with the connecting plate, and the other end of the crossbeam is connected with the other Y-direction linear motor; and under the drive of the X-direction micromotion motor, the two Y-direction linear motors perform X-direction micromotion, and the straightness of each of the two Y-direction linear motors is ensured during the Y-direction motion. The MDOF coarse motion workpiece platform adopts the X-direction micromotion motor as an auxiliary mechanism, and the controllability of the X-direction micromotion motor ensures that the Y-direction linear motors are very high in straightness during work, and realizes large-range Rz motion.

Description

technical field [0001] The invention relates to a photolithography machine, in particular to a multi-degree-of-freedom coarse motion workpiece table. Background technique [0002] The workpiece table of the lithography machine mostly adopts the form of "H" structure, that is, the Y direction is driven by two long-stroke linear motors, and the X direction is driven by a long-stroke linear motor. By controlling the movement of the long-stroke linear motors in the X and Y directions, the movement of the workpiece table in the X and Y directions is realized; by controlling the mutual movement of two long-stroke linear motors in the Y direction, the Rz movement of the workpiece table is realized. When the workpiece table moves in the X direction, due to the influence of the action force and the reaction force, it will give a certain impact force to the Y direction motors on both sides, so that the Y direction motors will deviate from the normal position. In order to ensure that ...

AI Technical Summary

Problems solved by technology

[0004] The shortcoming of this prior art is, adds flexible block, and the structure of coarse motion workpiece table becomes complicated; Simultaneously, the design and the processing of flexible block are a difficult problem, often need to carry out a large amount of simulation analysis, process many flexible blocks, just can It is possible to meet the requirements; in addition, after adding flexible blocks, the control becomes more complicated

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