Substrate holding device, substrate holding method, and method of manufacturing laminated glass
A technology for holding devices and substrates, used in glass manufacturing equipment, manufacturing tools, glass transportation equipment, etc., can solve the problems of increased length, increased equipment costs, and inability to achieve miniaturization, and achieve a simple and compact structure and ensure positional accuracy. Effect
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[0066] figure 1 is a side sectional view showing a schematic structure of a substrate holding device according to an embodiment of the present invention, figure 2 From figure 1 A rough top view of the A-A observation, image 3 is enlarged figure 2 The top view and side view of part C of Figure 4 It is a side sectional view showing a schematic structure of a vacuum chamber in which a substrate holding device according to an embodiment of the present invention can be installed, Figure 5 It is a side sectional view explaining the adsorption|suction of the board|substrate in the holding|maintenance apparatus of the board|substrate concerning one embodiment of this invention, Figure 6 It is a side sectional view explaining the holding|maintenance of the board|substrate in the holding|maintenance apparatus of the board|substrate concerning one Embodiment of this invention, Figure 7 It is a schematic side sectional view explaining the relative positions of a plurality of e...
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