Substrate holding device, substrate holding method, and method of manufacturing laminated glass
A technology for holding devices and substrates, applied to glass manufacturing equipment, manufacturing tools, glass transportation equipment, etc., can solve problems such as increased length, increased equipment costs, and substrate drop-off, and achieves the effect of simple and compact structure and ensuring positional accuracy
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[0066] figure 1 is a side sectional view showing a schematic structure of a substrate holding device according to an embodiment of the present invention, figure 2 From figure 1 A rough top view of the A-A observation, image 3 is enlarged figure 2 The top view and side view of part C of Figure 4 It is a side sectional view showing a schematic structure of a vacuum chamber in which a substrate holding device according to an embodiment of the present invention can be installed, Figure 5 It is a side sectional view explaining the adsorption|suction of the board|substrate in the holding|maintenance apparatus of the board|substrate concerning one embodiment of this invention, Figure 6 It is a side sectional view explaining the holding|maintenance of the board|substrate in the holding|maintenance apparatus of the board|substrate concerning one Embodiment of this invention, Figure 7 It is a schematic side sectional view explaining the relative positions of a plurality of e...
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