Method for manufacturing PLC (Programmable Logic Controller) device

A manufacturing method and device technology, applied to optical elements, light guides, optics, etc., can solve the problems of high raw material requirements, difficult manufacturing, high maintenance costs, etc., and achieve the effect of low production equipment requirements, low raw material efficiency, and reduced production costs

Inactive Publication Date: 2013-04-10
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the problem exists in high investment in equipment, high maintenance costs, and high requirements for raw materials (all imported materials are used), and this technology is difficult to manufacture

Method used

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  • Method for manufacturing PLC (Programmable Logic Controller) device
  • Method for manufacturing PLC (Programmable Logic Controller) device
  • Method for manufacturing PLC (Programmable Logic Controller) device

Examples

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Embodiment Construction

[0026] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. In the drawings, for the convenience of illustration, the thicknesses of layers and regions are enlarged or reduced, and the sizes shown do not represent actual sizes. Although these figures do not fully reflect the actual size of the device, they still completely reflect the mutual positions between the regions and the constituent structures, especially the upper-lower and adjacent relationships between the constituent structures. Meanwhile, in the following description, the term substrate used can be understood to include the semiconductor substrate being processed, possibly including other thin film layers prepared thereon.

[0027] Figure 6 It is a schematic diagram of an embodiment of the optical waveguide provided by the present invention, and the direction indicated by CD is the light propagation direction in the silica optical ...

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Abstract

The invention belongs to the technical field of planar optic splitters, and particularly relates to a method for manufacturing an optic waveguide. The method comprises the steps of: forming a layer of photoresist on a glass substrate; carrying out photoetching to form a graph; forming an optic waveguide core layer with high refractive index in a groove between the photoresist; stripping the photoresist; and forming an upper film coating layer with low refractive index. The method for manufacturing the optic waveguide is simple in technological process, low in requirements of raw materials andproduction equipment, low in production cost and easy for realizing industrialized scale production.

Description

technical field [0001] The invention belongs to the technical field of PLC splitters, and in particular relates to a method for manufacturing a planar lightwave circuit (PLC). Background technique [0002] At present, the construction of FTTX (fiber-optic access network) is gradually unfolding, specifically to realize FTTC (fiber-to-the-curb), FTTB (fiber-to-the-building), FTTH (fiber-to-the-home), FTTD (fiber-to-the-desktop), triple play ( Voice network, data network, cable TV network) and other multimedia transmission and PDS (integrated wiring system) solutions. To build an all-fiber network, in addition to the need for various structural distribution cables and lead-in cables to realize the connection and redistribution of the fiber network, a large number of optical splitters are also required to finally complete the purpose of fiber-to-the-home. [0003] PLC optical devices are generally made on six materials, which are: lithium niobate (LiNbO3), III-V semiconductor c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/136G02B6/132
Inventor 王鹏飞张卫
Owner FUDAN UNIV
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